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A kind of high temperature low friction coefficient hard coating and preparation method thereof

A low friction coefficient, hard coating technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problems of wear resistance decline, limited application and other problems, achieve easy content, easy implementation, simple craftsmanship

Active Publication Date: 2018-04-17
宁波云涂科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The coefficient of friction at high temperature can be lower, but the wear resistance drops sharply, which limits its application in severe cutting conditions
At present, there are no reports on the literature on Mo-B-C-N quaternary coatings

Method used

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  • A kind of high temperature low friction coefficient hard coating and preparation method thereof
  • A kind of high temperature low friction coefficient hard coating and preparation method thereof
  • A kind of high temperature low friction coefficient hard coating and preparation method thereof

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preparation example Construction

[0032] The specific steps of the preparation method of the high temperature low friction coefficient hard coating provided by the invention are:

[0033] 1) Use metal (steel, cast iron or hard alloy) or ceramics as the base, degrease, deoxidize, dry with hot air, and then fix it on the rotatable workpiece holder in the vacuum chamber;

[0034] 2) Combine high-purity Mo and a certain amount of B 4 The composite target composed of C sheets is installed on the magnetron sputtering source; the metal Mo and B in the composite target 4 The area ratio of C is 20:1~2:1, the purity of Mo is 99.99%, B 4 The purity of C is 99.9%, and the distance between the composite target and the substrate is 80-120mm;

[0035] 3) Then pump the vacuum in the vacuum chamber to ≤5×10 -4 Pa, the flow rate is 20sccm Ar, when the vacuum chamber pressure is 0.3Pa, pre-sputtering Mo / B 4 C composite target 5min, pre-sputtering power is 150W;

[0036] 4) Then the ion source is fed with 6sccm argon gas, an...

Embodiment 1

[0041] 1) Will figure 1 Medium molybdenum target and 2 pieces of B 4 The composite target composed of C is used as the magnetron sputtering source, where B 4 The area ratio of C to Mo is 1:9, and the distance between the composite target and the substrate is 10cm;

[0042] 2) Select high-speed steel as the base material, derust and polish its surface, and clean it with acetone, alcohol and deionized water in an ultrasonic cleaner for 10 minutes respectively, then dry it with hot air and place it on the sample stage in the vacuum chamber;

[0043] 3) The vacuum degree in the vacuum chamber is pumped to ≤5×10 -4 After Pa, clean the surface of the substrate with argon ion beam sputtering for 10 min, ion energy 800eV, beam current density 10μA / cm 2 ;

[0044] 4) Introduce 4sccm argon and 20sccm nitrogen, the flow ratio is 1:5, and the working pressure is 1Pa to form a mixed atmosphere, using magnetron sputtering technology to sputter Mo and B 4 C composite target, energy 2000eV...

Embodiment 2

[0046] 1) Will figure 1 Medium molybdenum target and 4 pieces of B 4 The composite target composed of C is used as the magnetron sputtering source, where B 4 The area ratio of C to Mo is 1:4.5, and the distance between the composite target and the substrate is 10cm;

[0047] 2) Select high-speed steel as the base material, derust and polish its surface, and clean it with acetone, alcohol and deionized water in an ultrasonic cleaner for 10 minutes respectively, then dry it with hot air and place it on the sample stage in the vacuum chamber;

[0048] 3) The vacuum degree in the vacuum chamber is pumped to ≤5×10 -4 After Pa, clean the surface of the substrate with argon ion beam sputtering for 10 min, ion energy 800eV, beam current density 10μA / cm 2 ;

[0049] 4) Introduce 4sccm argon and 20sccm nitrogen, the flow ratio is 1:5, and the working pressure is 1Pa to form a mixed atmosphere, using magnetron sputtering technology to sputter Mo and B 4 C composite target, energy 20...

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Abstract

The invention discloses a high-temperature and low-friction-coefficient hard coating layer and a preparation method thereof. A reactive magnetron sputtering technology is adopted to sputter a metal Mo and B4C composite target on a cathode; the metal Mo and B4C composite target is reacted with N2 in Ar and N2 mixed gas in a vacuum chamber to form a Mo-B-C-N quaternary hard coating layer with proper contents of elements C and B on the surface of a substrate; the Mo-B-C-N quaternary hard coating layer is the high-temperature and low-friction-coefficient hard coating layer; and the contents of B and C in the coating layer are easy to control through adjusting an area of B4C in the composite target. The atomic percentages of elements of C, B, Mo and N in the coating layer are respectively 2-12%, 0.5-8%, 55-42% and 44-38%. The method is simple in process and easy to carry out. The prepared high-temperature and low-friction-coefficient hard coating layer overcomes the defects of performances of a traditional hard plating layer, has the characteristics of high hardness, wear resistance, high temperature and low friction coefficient, and is excellent in promotion and application prospect on a high-speed cutting tool.

Description

technical field [0001] The invention belongs to the technical field of material surface coatings, and in particular relates to a high-temperature, low-friction-coefficient hard coating and a preparation method thereof. Background technique [0002] With the development of modern machinery manufacturing industry, high-speed, high-precision automatic processing equipment and extensive use of difficult-to-machine materials have put forward higher requirements for high-performance metal cutting tools. The hard coating has high thermal stability and chemical inertness, which reduces the transmission of cutting friction heat to the substrate, and the high hardness and good wear resistance of the coating itself ensure the good sharpness and cutting performance of the cutting edge. However, during high-speed cutting, the performance of liquid lubricants often faces the problem of attenuation due to high temperature. The cutting fluid consumes a lot of resources and energy in the pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/0688C23C14/3407C23C14/35
Inventor 朱晓东商琛李倩叶邱龙时徐可为
Owner 宁波云涂科技有限公司
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