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A nanocrystalline zrb 2 Superhard coating and preparation method thereof

A hard coating and nanocrystalline technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of limited ablation resistance, achieve good thermal stability and thermal shock resistance, High melting point and excellent wear resistance

Active Publication Date: 2018-02-06
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the SiC-introduced coating can provide good anti-ablation protection for the substrate material in a certain temperature range, the anti-ablation performance of the coating at higher temperatures is limited.

Method used

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  • A nanocrystalline zrb <sub>2</sub> Superhard coating and preparation method thereof
  • A nanocrystalline zrb <sub>2</sub> Superhard coating and preparation method thereof
  • A nanocrystalline zrb <sub>2</sub> Superhard coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] In this example, ZrB is deposited on a mirror-polished single crystal Si wafer ((100) orientation) 2 coating, the sample size is 40×30×0.7 mm. The substrate was ultrasonically cleaned in acetone and alcohol solutions for 20 minutes respectively, then dried with high-purity nitrogen, and then placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on a V-TECH AS610 high-power pulse and pulse DC composite magnetron sputtering coating machine, and the cathode target is made of metal Zr and compound ZrB 2 (Purities are all wt.99.9%), the former is used for bombardment cleaning and deposition of metal Zr transition layer on the surface of the substrate, and the latter is used for deposition of ZrB 2 Coating, the entire coating process is carried out in an argon atmosphere.

[0025] First, the background vacuum of the vacuum chamber is evacuated to 3×10 -3 Pa, and then argon gas was introduced into the vacuum chamber to perf...

Embodiment 2

[0028] This embodiment is to deposit ZrB on a mirror-polished AISI 304 stainless steel substrate (Cr-18.5, Ni-9.4, Mn-0.8, Si-0.4, P-0.1, Fe balance, all by weight percentage)2 Coating, the sample size is 30×25×1 mm. The substrate was first ground and polished with metallographic sandpaper, then ultrasonically cleaned with acetone and alcohol solutions, dried and placed on the sample holder facing the target in the vacuum chamber. The deposition parameters are the same as in Example 1. Same as Example 1, the ZrB grown along the (001) crystal plane in the coating 2 phase-based. Figure 4(a)~(b) shows the deposition of ZrB on the stainless steel substrate 2 The surface hardness and bonding force test results of the coating show that the measured hardness of the coating varies in the range of 58.5 to 63.2 GPa, and the average value of ten measurements is 60.4 GPa (Figure 4(a)). hardness. The bonding strength between the coating and the substrate was tested by the scratch metho...

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Abstract

The invention relates to a hard coating and a preparation technology thereof, in particular to a superhard ZrB2 coating and a preparation process thereof. The ZrB2 coating is deposited on a metal or alloy matrix through a high-power pulse and pulse direct current composite magnetron sputtering technology. Metal Zr and a compound ZrB2 (the purity of the Zr and the purity of the ZrB2 are both wt. 99.9%) are selected to serve as target materials, the metal Zr is used for bombarding and cleaning the surface of the matrix and depositing a transition layer of the metal Zr, the compound ZrB2 is used for depositing the ZrB2 coating, and the film coating process is always conducted in the argon atmosphere. According to the ZrB2 coating, the preparation repeatability is good, and industrialized production is easy; the prepared ZrB2 coating has the high melting point, hardness and elastic modulus and good abrasion resistance; in addition, the organizational structure is compact, and the binding force between the coating and the matrix is high.

Description

technical field [0001] The present invention relates to coating preparation technology, specifically a kind of nanocrystalline ZrB 2 Preparation method of superhard coating. Background technique [0002] ZrB 2 It has the advantages of high chemical stability, high electrical conductivity and thermal conductivity, good flame retardancy, high oxidation resistance and corrosion resistance, and its film form has high hardness and good wear resistance. Preparation of ZrB with ultrahigh hardness 2 Coatings, which combine their excellent properties with the toughness and machinability of metal or alloy substrates, can meet people's extensive needs in the field of wear-resistant materials. However, due to its high melting point and difficulty in densification by sintering, the preparation cost of bulk materials is high and the difficulty increases, which hinders the wide application of this material. ZrB 2 The melting point of ZrB is 3245 ℃, and its bulk form is difficult to si...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
Inventor 王铁钢刘艳梅范其香蔡玉俊戚厚军阎兵李彤韩翠红
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE