Band-pass and band-stop filter based on anti-symmetric multimode Bragg light guide grating
A technology of band-stop filter and waveguide grating, which is applied in the direction of light guide, optics, instrument, etc., can solve the problems of unstable light source, inability to realize direct extraction of reflection spectrum, inability to realize large filter bandwidth, etc., and achieve compatibility with CMOS technology, Easy to integrate and expand, compact effects
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[0039] Such as figure 1 , figure 2 and Figure 4 As shown, the silicon-on-insulator (SOI) material with a top silicon thickness of 220nm and a silicon oxide buried layer of 2 μm is used. After the wafer surface is cleaned, deep ultraviolet lithography or electron beam direct writing lithography is performed to obtain a silicon etching mask. film, through silicon dry etching, to produce a strip waveguide with a height of 220nm, in which the width of the single-mode waveguide is 450nm, and the width of the multi-mode waveguide is 900nm. The grating, the rectangular grating tooth is 150nm, its period is 310nm, and the length of the Bragg waveguide grating is 300μm.
[0040] The grating period parameters in the above embodiments are designed for multimode strip waveguides with an operating wavelength of 1550nm and a width of 900nm. The device is also suitable for multimode strip waveguides with other operating wavelengths and widths, and is also suitable for devices with differen...
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