Preparation technology of Zr-B-N nano-composite coating

A nano-composite coating and preparation process technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve the problems of short crack propagation path, reduced coating toughness, easy breakage, etc., and achieve a good combination Strength, improving coating toughness, good effect of impact load resistance

Active Publication Date: 2016-08-24
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, ZrB 2 As a wear-resistant coating, the coating is easily broken during use. The (001) texture of the columnar grains makes it anisotropic, and its grain boundaries perpendicular to the surface provide a short crack propagation path, making the coating tough. Greatly reduced

Method used

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  • Preparation technology of Zr-B-N nano-composite coating
  • Preparation technology of Zr-B-N nano-composite coating
  • Preparation technology of Zr-B-N nano-composite coating

Examples

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Embodiment 1

[0026] In this example, a Zr-B-N coating is deposited on a mirror-polished single-crystal Si wafer ((100) orientation), and the sample size is 40×30×0.7 mm. The substrate was ultrasonically cleaned in acetone and alcohol solutions for 20 minutes respectively, then dried with high-purity nitrogen, and then placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on a V-TECH AS610 high-power pulse and pulse DC composite magnetron sputtering coating machine, and the cathode target materials are metal Zr and compound ZrB respectively. 2 (purity is wt.99.9%), the working gas and reaction gas are respectively Ar and N 2 (both purity 99.999%), figure 1 The target layout diagram for high power pulsed and pulsed DC magnetron sputtering.

[0027] First, the background vacuum of the vacuum chamber is evacuated to 2.0×10 -3 Pa, and then argon gas was introduced into the vacuum chamber to perform glow discharge cleaning on the surface of t...

Embodiment 2

[0030] In this example, a Zr-B-N coating is deposited on a mirror-polished AISI 304 stainless steel substrate (Cr-18.5, Ni-9.4, Mn-0.8, Si-0.4, P-0.1, Fe balance, all by weight percentage) , the sample size is 30×25×1 mm. The substrate was first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone and alcohol solutions respectively, dried and placed on the sample holder facing the target in the vacuum chamber. The deposition parameters are the same as in Example 1. Same as Example 1, there are ZrN phase and amorphous BN phase preferentially growing along the (001) crystal plane in the coating.

[0031] Using nano-indentation technology, the hardness of Zr-B-N coating deposited on the stainless steel substrate was tested by continuous stiffness method. The measurement results were in the range of 45.4-50.2 GPa, and the average value of ten measurements was 48.2 GPa. The coating has a high hardness. The bonding strength between the coating...

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Abstract

The invention relates to a nano-composite coating and a preparation technology thereof, in particular to a preparation technology of a Zr-B-N nano-composite coating. High-power pulse and pulse direct-current composite magnetron sputtering technologies are adopted for depositing the Zr-B-N nano-composite coating on a metal or alloy matrix. In order to improve the content of the Zr element in the coating, metal Zr and a compound ZrB2 (both with the purity of wt.99.9% and the diameter of 80 mm) are simultaneously selected as target materials, Ar gas is introduced at first before film coating, high-power pulse magnetron sputtering is carried out on the Zr target to carry out bombardment cleaning on the surface of the matrix, then, a metal Zr transition layer is deposited, finally, reaction gas N2 is introduced, build-up of luminance is achieved for the Zr target and the ZrB2 target simultaneously, and the Zr-B-N coating is started to be deposited. The preparation technology of the Zr-B-N nano-composite coating is simple, good in repeatability and easy to produce industrially. The prepared Zr-B-N coating has high toughness and strength and good wear resistance and is compact in structure texture, and the binding force between the coating and the matrix is strong.

Description

technical field [0001] The invention relates to a coating preparation technology, in particular to a preparation technology of a Zr-B-N nanocomposite coating. Background technique [0002] In recent years, the use of wear-resistant hard coatings on mechanical, forged and formed components has become increasingly important not only to save costs but also to increase the service life of the material. ZrB 2 The coating has the advantages of high chemical stability, high electrical and thermal conductivity, good flame retardancy, high oxidation and corrosion resistance, and ultra-high hardness. However, ZrB 2 As a wear-resistant coating, the coating is easily broken during use. The (001) texture of the columnar grains makes it anisotropic, and its grain boundaries perpendicular to the surface provide a short crack propagation path, making the coating tough. Greatly reduced. In order to increase ZrB 2 The toughness and wear resistance of the coating can be improved in ZrB 2...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/14C23C14/35C23C14/02
CPCC23C14/022C23C14/0641C23C14/0647C23C14/067C23C14/14C23C14/352
Inventor 王铁钢刘艳梅范其香董玉阎兵戚厚军李彤
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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