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Fabrication method of graphene-gold composite electrode for diamond radiation detector

A radiation detector, composite electrode technology, applied in circuits, electrical components, semiconductor devices, etc., can solve problems such as poor thermal stability, reduce contact resistivity, etc., to avoid polarization, reduce contact resistivity, avoid The effect of instability

Inactive Publication Date: 2016-08-24
SHANGHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The main feature of the present invention is that graphene is used instead of titanium as the tunnel layer, which reduces the contact resistivity, avoids the polarization phenomenon of titanium oxide, and solves the problem of thermal stability in the titanium-platinum-gold three-layer metal system. good question

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  • Fabrication method of graphene-gold composite electrode for diamond radiation detector
  • Fabrication method of graphene-gold composite electrode for diamond radiation detector

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Embodiment

[0026] The specific preparation process and steps in this example are as follows.

[0027] a. Preparation of graphene layer

[0028] Graphene oxide was spin-coated onto polycrystalline diamond films using the spin-coating method. The spin-coating process parameter is 6000 r / min, and 7 drops are spin-coated with a pipette gun.

[0029] Graphene oxide needs to be reduced, and the steps are as follows: put the diamond film sample coated with graphene oxide into a tube annealing furnace, feed nitrogen into the furnace tube and keep the pressure in the tube at standard atmospheric pressure, and the nitrogen flow rate is 160 sccm. Set the heating program, the temperature is 400°C, the heating rate is 2°C / min, the holding time is 1h, and finally it is cooled naturally, and the sample is taken out to obtain a graphene-coated diamond film.

[0030] b. Preparation of metal gold thin film

[0031] A gold target is used to prepare a metal gold film on the graphene surface layer by an e...

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Abstract

The invention relates to a fabrication method for an ohmic contact electrode of a diamond radiation detector, and belongs to the technical field of a fabrication process for the diamond radiation detector. The fabrication method comprises the following steps of fabricating a graphene layer on the surface of a diamond thin film by a spin-coating method, fabricating a gold electrode on the surface of the graphene layer by a vacuum evaporation method or an electron beam evaporation method, fabricating a graphene-gold dual-layer system, and carrying out annealing in a nitrogen atmosphere to form the ohmic contact electrode. The dual-layer graphene-gold dual-layer ohmic electrode has relatively good ohmic contact characteristic and relatively low contact resistivity, the device performance is obviously improved, and moreover, the fabrication process is relatively simple.

Description

technical field [0001] The invention relates to an optimized preparation method for an ohmic contact electrode of a diamond radiation detector, and belongs to the technical field of diamond film radiation detector manufacturing technology. Background technique [0002] Diamond is a wide bandgap semiconductor material. In general, it is difficult to make ohmic contacts on wide bandgap semiconductors. Usually, a metal that can react with diamond to form carbide is deposited on the diamond film, and after high temperature treatment, the metal and diamond undergo carbonization reaction at the interface to form carbide. [0003] At present, the electrode structure of diamond ohmic contact mainly adopts gold single-layer system and titanium-platinum-gold three-layer system. Gold has excellent electrical conductivity and corrosion resistance, and is an ideal ohmic contact material. Platinum acts as a barrier layer, which can not only prevent the diffusion of gold into titanium a...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/09
CPCH01L31/18H01L31/09
Inventor 王林军于鸿泽黄健李伦娟杨巍川任兵
Owner SHANGHAI UNIV