Heterojunction solar cell taking silicon nanorod array as substrate and fabrication method of heterojunction solar cell

Abstract

The invention discloses a heterojunction solar cell taking a silicon nanorod array as a substrate and a fabrication method of the heterojunction solar cell. The solar cell uses a silicon nanorod array with a large depth-width ratio as the substrate, and other thin film materials are wrapped by a magnetron sputtering method to form a heterojunction structure. The fabrication method comprises the following steps of fabricating the silicon nanorod array with the large depth-width ratio on a surface of a P-type silicon wafer by a self-assembly method of a cesium chloride nanometer island; fabricating an aluminum back filed on a back surface; wrapping a surface of the silicon nanorod array with an N-type material layer such as zinc oxide and cadmium sulfide by the magnetron sputtering method; covering a surface of the N-type material layer with an ITO transparent conductive layer; and fabricating a titanium-silver electrode on an upper surface. The solar cell taking the silicon nanorod array with the large depth-width ratio as the substrate has the advantages that 1, the surface ratio of the substrate can be effectively increased, the effective area of a heterojunction is expanded, and absorption to incident light is improved; and 2, by means of a favorable light trapping effect, reflection can be reduced, and the performance of the heterojunction cell is improved.

Description

Technical field [0001] The invention relates to semiconductor micro-nano processing technology and the technical field of heterojunction solar cells, in particular to a heterojunction solar cell with a large aspect ratio silicon nano-pillar array as a substrate and a preparation method thereof. Background technique [0002] Nano-array is a new type of surface structure, which has huge industrial applications in many fields such as solar cells and LEDs. Nano-texturing has the characteristic of reducing visible light reflection. For traditional monocrystalline or polycrystalline silicon solar cells, nano-texturing such as nanowires and nanopillars can be directly prepared on the silicon surface, and the light trapping effect of the nanoarray can effectively improve the short-circuit current and battery efficiency of the solar cell. [0003] The cumbersome preparation process and high cost limit the promotion of traditional solar cells. Using a simple process to deposit a layer of tr...

AI Technical Summary

Problems solved by technology

[0005] In 2011, Chuan He et al. prepared nanohole arrays on the surface of polished silicon wafers by hydrothermal method, and then prepared cadmium sulfide films on the rough surface by chemical bath deposition. This method can effectively reduce reflection, but the photoelectric conversion efficiency Only 1.15×10 -4 % (Chuan He, Chang BaoHan, Yu Rui Xu, and Xin Jian Li, Photovoltaic effect of CdS / Sinanoheterojunction array, JOURNAL OF APPLIEDPHYSICS 110, 094316 (2011))

Images