A kind of heat stage of ray microprobe, heat stage device and its experimental method

Abstract

The invention discloses a heating stage for X-ray microprobes. The heating stage comprises a heating stage body, a heater and a sample holder; an incident window and a transmitting window are coaxially and correspondingly arranged on the front wall and the rear wall of the heating stage body respectively, and the bottom of the heating stage body can be mounted on a sample positioning platform; the sample holder is sleeved in the heater in high heating area ratio; each of the heater and the sample holder is provided with a light transmission hole, and the light transmission hole is coaxial with the incident window and the transmitting window. The heating stage for the X-ray microprobes can be operated vertically, and temperature gradient of samples is small; in addition, the heating stage has the advantages of high light transmission, vacuum chamber, easiness in alignment, good temperature uniform of the samples, wide sample type and shape adaptability, high operation temperature limit and the like. In addition, the invention further discloses a heating stage device and an experimental method thereof. The heating stage device is high in back-scattered fluorescent detection efficiency, sufficient rotatable angle and detection angle, overall atmosphere protection and vacuum environment are provided for the samples. The heating stage, the heating stage device and the experimental method are especially suitable for hard X-ray microprobes.

Description

technical field [0001] The invention relates to an in-situ high-temperature characterization technique, in particular to a heat stage of a ray microprobe, a heat stage device and an experimental method thereof. Background technique [0002] For a long time, material research has usually been carried out using traditional scientific intuition, "cooking and screening" or "trial and error" methods, that is, based on a large amount of experimental data, repeatedly adjusting and testing the composition-process-structure-performance until a satisfactory material is obtained . This method has considerable blindness, time-consuming and labor-intensive, high cost, and low efficiency, and has increasingly become the bottleneck of social development and technological progress. The Materials Genome Project, which has emerged in recent years, intends to comprehensively increase the speed of advanced materials from discovery to application and reduce costs by integrating three major tech...

AI Technical Summary

Problems solved by technology

The low transmittance of the window mainly affects the detection of low atomic number elements

The window with the highest light transmittance of the Linkam hot stage is made of quartz with a thickness of 0.17mm. For X-rays with energy lower than 5keV, the light transmittance is almost zero; for 6.40keV Fe KL3 lines, the fluorescence transmittance is less than 5%. It is even more difficult to detect many important elements such as Mn, Cr, V, Ti, Sc, Ca and K with atomic numbers lower than Fe

[0006] (2) It is difficult to center the sample

This is very inconvenient to adjust the rotation center through the electric table

In addition, the high-temperature hot stage does not consider the problem of how to locate the sample when the signal characteristics of the transmission are not obvious, such as using the rotation center of the sample chamber to assist the positioning problem

[0009] (3) Sample temperature gradient and uniformity

[0011] (4) Backscattered fluorescence detection problem

Apparently, the drawbacks of low X-ray transmittance of existing commercial microscope hot stages described in problem (1) also hinder the detection of backscattered fluorescence of samples in it

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