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A kind of tisinin nanocomposite coating and preparation method thereof

A nano-composite coating and nano-grain technology, which is applied in the field of materials science, can solve the problems of not meeting the requirements of high-speed cutting performance, super-high hardness of composite coating, deposition conditions of anti-oxidation performance, and deposition efficiency. The effects of variable stress field enhancement, improved surface performance and service life, and low energy consumption

Active Publication Date: 2019-03-19
UNIV OF SHANGHAI FOR SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] Aiming at the above technical problems in the prior art, the invention provides a TiSiNiN nanocomposite coating and a preparation method thereof. The TiSiNiN nanocomposite coating and its preparation method will solve the problems of the composite coating in the prior art. Ultra-high hardness, oxidation resistance, deposition conditions, and deposition efficiency cannot be balanced, and the technical problems cannot meet the performance requirements of high-speed cutting and dry cutting

Method used

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preparation example Construction

[0024] Preparation, characterization and measuring instruments used in the present invention:

[0025] JGP-450 Magnetron Sputtering System, Shenyang Scientific Instrument Development Center Co., Ltd., Chinese Academy of Sciences

[0026] D8 Advance X-ray diffractometer, Bruker, Germany

[0027] NANO Indenter G200 nanoindenter, Agilent Technologies, USA

[0028] Tecnai G 2 Model 20 high-resolution transmission electron microscope, FEI, USA

[0029] Quanta FEG450 scanning electron microscope (with Oxford energy spectrometer), American FEI company

Embodiment 1

[0031] A preparation method for a TiSiNiN nanocomposite coating, comprising the steps of:

[0032] 1) A step of cleaning the substrate, sending the polished substrate into an ultrasonic cleaning machine, and using 15-30 kHz ultrasonic waves in absolute alcohol and acetone to clean it for 5-10 minutes; then perform ion cleaning; the ion cleaning Put the substrate into the vacuum chamber and evacuate to 4×10 -4 Pa~10×10 -4 Ar gas is introduced after Pa, the vacuum is maintained at 2-4Pa, and the substrate is bombarded with ions at 13.56Hz (intermediate frequency) for 20-40min, with a power of 80-100W; the substrate is single crystal Si;

[0033] 2) Using a multi-target magnetron sputtering apparatus, the step of performing magnetron sputtering reaction deposition on the substrate by the TiSiNi composite target; putting the cleaned substrate into the multi-target magnetron sputtering apparatus and staying in front of the TiSiNi composite target ; using Ti 20 Si 5 Ni 0 (80ato...

Embodiment 2

[0036] A preparation method for a TiSiNiN nanocomposite coating, comprising the steps of:

[0037] 1) A step of cleaning the substrate, sending the polished substrate into an ultrasonic cleaning machine, and using 15-30 kHz ultrasonic waves in absolute alcohol and acetone to clean it for 5-10 minutes; then perform ion cleaning; the ion cleaning Put the substrate into the vacuum chamber and evacuate to 4×10 -4 Pa~10×10 -4 Ar gas is introduced after Pa, the vacuum degree is maintained at 2-4Pa, and the substrate is bombarded with ions for 20-40min with a medium frequency, and the power is 80-100W; the substrate is single crystal Si;

[0038] 2) Using a multi-target magnetron sputtering apparatus, the step of performing magnetron sputtering reaction deposition on the substrate by the TiSiNi composite target; putting the cleaned substrate into the multi-target magnetron sputtering apparatus and staying in front of the TiSiNi composite target ; using Ti 20 Si 4 Ni 1 (80atom%:1...

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Abstract

The invention provides a TiSiNiN nano-composite coating. The TiSiNiN nano-composite coating is a composite structure with TiN nano-grains being wrapped with a boundary phase. The boundary phase is composed of two phases, namely a compound Si3N4 and metal Ni. The invention further provides a preparation method of the TiSiNiN nano-composite coating. The preparation method of the TiSiNiN nano-composite coating comprises the steps that firstly, a matrix is washed; and secondly, magnetron sputtering reaction deposition is conducted on the matrix through a multi-target magnetron sputtering instrument by means of a TiSiNi composite target, and by atomic ratio, the atomic weight of Ti in the TiSiNi composite target is 80%, and the total atomic weight of Si and Ni in the TiSiNi composite target is 20%. The maximum hardness of the TiSiNiN nano-composite coating can reach 48.643 GPa, and the TiSiNiN nano-composite coating can be applied to the surface of a dry type high-speed cutting tool and the surface of a component serving under a frictional abrasion condition, so that the surface performance of the tool and the component is improved, and the service life of the tool and the component is prolonged. The preparation method has the advantages that the technique is simple, the deposition speed is high, cost is low, and the bonding strength is high.

Description

technical field [0001] The invention belongs to the field of materials science and relates to a hard protective coating, in particular to a TiSiNiN nanocomposite coating and a preparation method thereof. Background technique [0002] With the progress of society and the development of science and technology, the surface performance requirements of materials are getting higher and higher. Various indicators such as high hardness, wear resistance, corrosion resistance, and high temperature resistance are important indicators to measure the performance of today's cutting tools. According to the engineering needs, coating a layer of hard coating on the surface of the material is an economical and practical way to improve the surface performance of the material. As an important branch of the mechanical functional film, the hard coating is widely used in machining tools , especially in metal cutting. [0003] Initially, TiN coating has attracted widespread attention due to its ou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/0036C23C14/0641C23C14/352
Inventor 李伟刘平杜浩明张柯马凤仓刘新宽陈小红何代华
Owner UNIV OF SHANGHAI FOR SCI & TECH
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