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Two-dimensional bismuth-oxide selenide crystal and near-infrared light based electric detector

A technology of bismuth selenium oxide and near-infrared light, applied in the field of materials

Inactive Publication Date: 2017-05-31
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] So far, there is no report on the preparation of near-infrared optoelectronic devices using two-dimensional bismuth selenium oxide.

Method used

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  • Two-dimensional bismuth-oxide selenide crystal and near-infrared light based electric detector
  • Two-dimensional bismuth-oxide selenide crystal and near-infrared light based electric detector
  • Two-dimensional bismuth-oxide selenide crystal and near-infrared light based electric detector

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Experimental program
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Embodiment 1

[0055] Embodiment 1, preparation two-dimensional bismuth selenium oxide crystal

[0056] Bi with a particle size of about 30 microns 2 o 3 Powder and Bi with a length of 5 cm on the longest side 2 Se 3 body as raw material, Bi 2 o 3 Powder and Bi 2 Se 3 The molar ratio of the block is 3:1, in mica (chemical formula is KMg 3 (AlSi 3 o 10 )F 2 ) on the substrate, the carrier gas is argon, the system pressure is 400torr, the deposition temperature is 570°C, the deposition is completed after 20 minutes of deposition, and the system is naturally cooled to room temperature to obtain the two-dimensional bismuth selenium oxide crystal provided by the present invention , the optical image under the metallographic microscope is as follows figure 1 As shown, the domain size is 50 μm.

[0057] Following the same steps as above, only changing the deposition time from 20 minutes to 35 minutes, a two-dimensional bismuth selenium oxide crystal with a domain size of 100 μm was obt...

Embodiment 2

[0058] Example 2: Construct a two-dimensional bismuth selenium oxide photodetector to detect wavelengths of 690-1770 nm.

[0059] 1) Preparation of bismuth selenium oxide photodetector:

[0060] The two-dimensional bismuth selenium oxide crystal with a domain size of 50 microns obtained in Example 1 was used P5350 positive photoresist, 4000r / min for 50s, and then baked at 110°C for 3min, and then subjected to ultraviolet exposure and development. After that, 5nm Cr / 45nm Au metal was thermally evaporated and lifted off with acetone to obtain marks for the next step of electron beam exposure on the mica substrate. Spin-coat 950KA4PMMA electron beam positive resist on the marked mica sample at a rotational speed of 2000r / min and bake at 150°C for 5min. Then spin-coat the water-soluble conductive polymer, the rotation speed is 2000r / min, and the glue-baking condition is 90°C for 1min. Use electron beam exposure to expose the arrayed pattern on the sample. After developing and f...

Embodiment 3

[0073] Example 3 Constructing a two-dimensional bismuth selenium oxide array photodetector to realize high-resolution near-infrared second-region imaging of the pattern "Peking University" (hair body)

[0074] 1) Using the two-dimensional bismuth selenium oxide crystal with a domain size of 100 microns obtained in Example 1, prepare according to the method of Example 2 step 1) image 3 The bismuth selenium oxide photodetector shown uses electron beam exposure and metal thermal evaporation to make a pattern with the "Peking University" (hair body) logo on a silicon wafer as an imaging object.

[0075] 2) Put the imaging object produced in the above step (1) on the motorized stage of the microscope, and place a black acrylic plastic plate on the imaging object as a shield, and the ordinary commercial visible light CCD will not be able to see the "Peking University" logo pattern . The position of the microscope CCD is replaced by the two-dimensional bismuth selenium oxide detecto...

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Abstract

The invention discloses a two-dimensional bismuth-oxide selenide crystal and a near-infrared light based electric detector. A method for preparing the two-dimensional bismuth-oxide selenide crystal includes the steps of taking Bi2O3 powder and Bi2Se3 blocks as raw materials, carrying out chemical vapor deposition on a substrate to obtain two-dimensional bismuth-oxide selenide crystal after finishing deposition. The near-infrared light based detector utilizing the two-dimensional bismuth-oxide selenide prepared by the method is applied to near-infrared detection, display and imaging effectively.

Description

technical field [0001] The invention belongs to the field of materials, and relates to a two-dimensional bismuth selenium oxide crystal and a near-infrared photoelectric detection device. Background technique [0002] Bismuth Selenium Oxide (Bi 2 o 2 Se) is a traditional thermoelectric material belonging to the tetragonal crystal system ( Z=2), by (Bi 2 o 2 ) n layer and Se n Alternately connected to form a two-dimensional layered crystal structure. The electrical transport studies of bismuth oxyselenide single crystal bulk material show that it has high mobility (higher than 300cm 2 V -1 the s -1 ). [0003] A photodetector is a device that converts an optical signal into an electrical signal. Generally, they are based on photoconductive or photovoltaic conversion mechanisms. The main parameters are: photoresponsivity, external quantum efficiency, detection rate, response time, etc. Although silicon-based integrated sensors and detectors are quite mature in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/02H01L31/18H01L31/032H01L31/09
CPCH01L21/02422H01L21/02565H01L21/0262H01L31/032H01L31/09H01L31/18Y02P70/50
Inventor 彭海琳尹建波谈振军刘玉静吴金雄
Owner PEKING UNIV