Cellulose base flexible zinc oxide ultraviolet photoelectric detector and preparation method therefor

An electric detector, zinc oxide technology, applied in the field of cellulose-based flexible zinc oxide ultraviolet photodetector and its preparation, can solve environmental pollution and other problems, achieve the effects of reducing environmental pollution, rich sources, and alleviating the shortage of oil resources

Inactive Publication Date: 2017-09-05
FUJIAN AGRI & FORESTRY UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These e-waste are usually disposed of by landfill or incineration, so they will cause serious pollution to the environment

Method used

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  • Cellulose base flexible zinc oxide ultraviolet photoelectric detector and preparation method therefor
  • Cellulose base flexible zinc oxide ultraviolet photoelectric detector and preparation method therefor
  • Cellulose base flexible zinc oxide ultraviolet photoelectric detector and preparation method therefor

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Experimental program
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Effect test

Embodiment 1

[0031] See attached figure 2 , with a high-haze (75%) transparent cellulose film 1 as the substrate, the preparation method can be found in the literature (Ming-ChunHsieh, Hirotaka Koga, Katsuaki Suganuma and Masaya Nogi, Scientific Reports, 2017, 7:41590), using magnetic Controlled sputtering growth of zinc oxide semiconductor film: using zinc oxide ceramic target as the target material, put the transparent cellulose film substrate with high haze into the magnetron sputtering chamber, and use the mechanical pump and molecular pump to evacuate the vacuum chamber. Background pressure less than 1×10 -4 When the pressure was Pa, high-purity argon gas was introduced, and when the pressure of the sputtering chamber was adjusted to 2 Pa, the growth of the zinc oxide semiconductor film was started, and the sputtering power was 100 W, and it was prepared on a transparent cellulose film 1 substrate with high haze. A zinc oxide semiconductor thin film 2 was obtained with a thickness ...

Embodiment 2

[0034] See attached figure 2 , with a high-haze (75%) transparent cellulose film 1 as the substrate, the preparation method can be found in the literature (Ming-ChunHsieh, Hirotaka Koga, Katsuaki Suganuma and Masaya Nogi, Scientific Reports, 2017, 7:41590), using magnetic Controlled sputtering growth of zinc oxide semiconductor film: using zinc oxide ceramic target as the target material, put the transparent cellulose film substrate with high haze into the magnetron sputtering chamber, and use the mechanical pump and molecular pump to evacuate the vacuum chamber. Background pressure less than 1×10 -4 When the pressure was Pa, high-purity argon gas was introduced, and when the pressure of the sputtering chamber was adjusted to 2 Pa, the growth of the zinc oxide semiconductor film was started, and the sputtering power was 100 W, and it was prepared on a transparent cellulose film 1 substrate with high haze. A zinc oxide semiconductor thin film 2 was obtained with a thickness ...

Embodiment 3

[0037] See attached figure 2 , using transparent cellulose film 1 with high haze (80%) as the substrate, and its preparation method can be found in the literature (Ming-ChunHsieh, Hirotaka Koga, Katsuaki Suganuma and Masaya Nogi, Scientific Reports, 2017, 7:41590), using magnetic Controlled sputtering growth of zinc oxide semiconductor film: using zinc oxide ceramic target as the target material, put the transparent cellulose film substrate with high haze into the magnetron sputtering chamber, and use the mechanical pump and molecular pump to evacuate the vacuum chamber. Background pressure less than 1×10 -4 When the pressure was Pa, high-purity argon gas was introduced, and when the pressure of the sputtering chamber was adjusted to 2 Pa, the growth of the zinc oxide semiconductor film was started, and the sputtering power was 100 W, and it was prepared on a transparent cellulose film 1 substrate with high haze. A zinc oxide semiconductor thin film 2 was obtained with a th...

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Abstract

The invention discloses a cellulose base flexible zinc oxide ultraviolet photoelectric detector and a preparation method therefor. The method specifically comprises the steps: taking a high-haze transparent cellulose film as a substrate, growing a zinc oxide semiconductor film through a magnetron sputtering method, enabling an interdigital electrode mask to be closely attached to the zinc oxide semiconductor film, growing a metal thin layer on the interdigital electrode mask and a zinc oxide semiconductor film interdigital electrode mask which is not covered by the interdigital electrode mask through an electron beam evaporation method, manufacturing a metal electrode on the zinc oxide semiconductor film after the interdigital electrode mask is removed, and finally preparing and obtaining the cellulose base flexible zinc oxide ultraviolet photoelectric detector. According to the invention, the high-haze transparent cellulose film is taken as the substrate for growing the zinc oxide semiconductor film, and the flexible ultraviolet photoelectric detector is prepared. The detector has the feature response for the ultraviolet light, and is flexible and bendable. The high-haze transparent cellulose substrate can achieve the light tripping effect, thereby improving the responsivity of the ultraviolet photoelectric detector.

Description

technical field [0001] The invention relates to a flexible ultraviolet photodetector and a preparation method thereof, in particular to a cellulose-based flexible zinc oxide ultraviolet photodetector and a preparation method thereof. Background technique [0002] Ultraviolet photodetectors are widely used in fire early warning, environmental ultraviolet detection, pollution flashover signal monitoring of high-voltage transmission lines, and medical diagnosis. Commonly used ultraviolet photodetectors are prepared using semiconductor films grown on rigid substrates, such as gallium nitride semiconductor films grown on sapphire substrates, or zinc oxide semiconductor films grown on quartz substrates, so they lack flexibility. characteristics. [0003] As human needs for electronic equipment change, the components inside the electronic equipment also need to be changed. Today, human beings have entered an era of wearable devices, which require flexibility and new user interfac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/09H01L31/0392H01L31/18
CPCH01L31/03926H01L31/09H01L31/1876Y02P70/50
Inventor 郑清洪陈礼辉黄六莲欧阳新华黄瑾
Owner FUJIAN AGRI & FORESTRY UNIV
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