Device and method for preparing two-dimensional transmission metal dichalcogenide (TMDC) atom crystal material under normal pressure
A technology of crystal materials and atoms, which is applied in the field of devices for preparing two-dimensional TMDC atomic crystal materials, can solve the problems of source material loss, discontinuity, poor repeatability, etc., and achieve the effect of saving resources and costs and improving reaction efficiency
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[0038] Example 1
[0039] The method for preparing a single wafer of tungsten disulfide in the order of 100 microns includes the following steps: placing tungsten trioxide (500 mg) in a carrier boat 2 in the quartz high-temperature tube furnace 11 so that the tungsten trioxide is located in the center of the tube furnace In the constant temperature zone, place the sulfur powder (1.5g) in the carrier-3 in the high-temperature tube furnace 11 so that it is located at the upstream position of the airflow. The sulfur powder can be heated separately by the heater-5, and the sapphire substrate 7 Placed in the sulfur vapor main transport pipe 1 of the high-temperature tube furnace 11, 20mm below the tungsten source vapor outlet, and pass 25sccm and 100sccm argon into the main transport pipe 1 and the secondary transport pipe 2, respectively The gas is used as the carrier gas, and the gas outlet end of the high-temperature tube furnace 11 is passed into the exhaust gas treatment device 1...
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[0043] Example 2
[0044] The method of preparing a single-layer continuous tungsten disulfide atomic layer film includes the following steps: placing tungsten trioxide (300 mg) in a carrier boat 2 in the quartz high-temperature tube furnace 11, and placing the tungsten trioxide in the center of the tube furnace In the constant temperature area, place the sulfur powder (1.2g) in the carrier-3 in the high-temperature tube furnace 11 so that it is located at the upstream position of the airflow. The sulfur powder can be heated by heater-5 alone; the sapphire substrate 7 Placed in the sulfur vapor main conveying pipe 1 of the high temperature tube furnace, it is located 20mm below the tungsten source vapor outlet, and 30sccm argon gas is passed into the main conveying pipe 1 as the carrier gas, and the secondary conveying pipe In 2, a mixed gas of 120 sccm argon and 10 sccm hydrogen is passed as carrier gas, and the outlet end of the high-temperature tube furnace 11 is passed into t...
Example Embodiment
[0048] Example 3
[0049] The method for preparing a multi-layer continuous molybdenum disulfide atomic layer film includes the following steps: placing molybdenum trioxide (500 mg) in the carrier boat 2 in the quartz high-temperature tube furnace 11, and placing the molybdenum trioxide in the tube furnace In the central constant temperature area, put sulfur powder (1.8g) in the carrier-3 in the high-temperature tube furnace 11 so that it is located at the upstream position of the airflow. The sulfur powder can be heated separately by heater-5, and the sapphire substrate 7 Placed in the sulfur vapor main conveying pipe 1 of the high temperature tube furnace 11, it is located 20mm below the tungsten source vapor outlet, and 30sccm argon gas is introduced into the main conveying pipe 1 and the secondary conveying pipe 2 respectively. Carrier gas, a mixed gas of 120sccm argon and 10sccm hydrogen is passed into the secondary transport pipe 2 as the carrier gas, and the outlet end of ...
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