A method of producing all-solid-state thin-film lithium battery
A lithium battery, all-solid-state technology, applied in secondary batteries, assembled battery machines, secondary battery manufacturing, etc., to achieve stable performance, fast efficiency, and avoid air pollution
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Embodiment 1
[0069] The unit structure of the battery is the traditional thin-film lithium battery structure LiCoO 2 / LiPON / Li, LiCoO 2 After preparation, heat treatment is required, and the battery is called a high-voltage thin-film lithium battery.
[0070] After ten cleaned 4-inch silicon wafers are placed in the battery packaging chamber 204 of the equipment, each chamber of the equipment is evacuated until the vacuum degree is better than 5×10 -4 Pa, using the three-axis vacuum cleaning robot of the sample transfer chamber 205, start the coating step (such as Figure 5 The structure shown in a in):
[0071] (1) A piece of silicon wafer is sent into the first vacuum coating chamber 201, utilizes the direct current pulse magnetron sputtering method, directly deposits 500nm thick, the Pt thin film of square resistance 0.5 ohm / square on the silicon wafer of covering mask;
[0072] (2) On top of this, 1000nm thick LiCoO was deposited using a DC pulse sputtering mask 2 Thin film, power ...
Embodiment 2
[0080] The unit structure of the battery is LiFeWO 4 / LiPON / Li, positive electrode LiFeWO 4 There is no need for heat treatment after preparation, and the electrolyte LiPON is directly deposited, which saves the coating and transfer process. The battery is called a high-voltage annealing-free thin-film lithium battery.
[0081] Clean the fixed ten polyimide foils (PI foils), place them in the battery packaging chamber 204 of the equipment, and evacuate each chamber of the equipment until the vacuum degree is better than 5×10 -4Pa, using the three-axis vacuum cleaning robot of the sample transfer chamber 205, start the coating step (such as Image 6 The structure shown in a in):
[0082] (1) Send a piece of PI foil into the first vacuum coating chamber 201, and use argon ions (0.09Pa, 800-1000V, 0.1-0.3A) ionized by the anode layer ion source to evenly bombard the PI foil for 10-20 minutes, and then During the process, the PI film is rotated against the ion source at 5 rpm, ...
Embodiment 3
[0089] The cell structure of the battery is LiMn 2 o 4 / LiPON, cathode LiMn 2 o 4 There is no need to deposit the negative electrode after preparation, which saves the coating and transfer process, and the negative electrode is formed during the first charging process after the battery is completed. The battery is called a high-voltage lithium-free thin-film lithium battery.
[0090] After ten cleaned 2-inch mica sheets are placed in the battery packaging chamber 204 of the equipment, each chamber of the equipment is evacuated until the vacuum degree is better than 5×10 -4 Pa, using the three-axis vacuum cleaning robot of the sample transfer chamber 205, start the coating step (such as Figure 5 The structure shown in a in):
[0091] (1) A piece of mica sheet is sent into the first vacuum coating chamber 201, and the direct current pulse magnetron sputtering method is used to directly deposit a 200nm thick Au film with a square resistance of 2 ohms / square on the mica shee...
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Abstract
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