Ultraviolet photodetector and preparation method based on single twin structure gan nanowire
A technology of electrical detectors and nanowires, applied in the field of photodetectors, can solve the problems of low photoresponsivity and external quantum efficiency, poor wavelength selectivity, and complicated preparation, and achieve excellent photocurrent stability and large switching ratio , the effect of high absorption coefficient
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[0035] In this embodiment, the specific steps for the preparation method of an ultraviolet photodetector based on a single twinned structure GaN nanowire are as follows:
[0036] 1) The sapphire substrate used for growing GaN nanowires was placed in acetone solution, alcohol solution and deionized water for ultrasonic cleaning, each step was cleaned for 10 minutes, and then dried with nitrogen gas after cleaning.
[0037] 2) Deposit a 5nm thick Au film on the sapphire substrate by means of electron beam evaporation.
[0038] 3) will be fitted with Ga 2 o 3 The powdered quartz crucible was placed in the center of the high temperature tube furnace, and then the sapphire substrate deposited with a 5nm thick Au film was placed downstream of the high temperature tube furnace. Then, argon gas is introduced into the high temperature tube furnace to remove residual oxygen in the tube furnace cavity.
[0039] 4) Raise the temperature of the high-temperature tube furnace, and when th...
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