Photoresist composition containing poly-p-hydroxystyrene epoxy resin serving as film-forming resin
A film-forming resin and composition technology, which can be applied to photosensitive materials, optics, and opto-mechanical equipment used in opto-mechanical equipment, etc., can solve the problems of difficult control of the degree of polycondensation reaction, complex process flow, and difficult operation.
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[0134] The present invention will be further described below in conjunction with examples, but it should not be understood as a limitation of the protection scope of the present invention.
[0135] The characterization and detection methods involved in the following examples are as follows:
[0136] 1. Infrared spectrum characterization method
[0137] The infrared spectrum is measured by Shimadzu IRAffinity Fourier transform infrared spectrometer, the scanning range is 4000-400cm -1 , The sample was processed by KBr tableting method.
[0138] 2. 1 H NMR spectrum characterization method
[0139] 1 The H NMR was measured with a Bruker Avame PRX400 nuclear magnetic resonance instrument, the chemical shift was expressed in ppm, the solvent was deuterated chloroform, the internal standard was tetramethylsilane, the scan width was 400 MHz, and the scan number was 16 times.
[0140] 3. Ultraviolet absorption spectrum measurement method
[0141] Using acetonitrile as the solvent, the sample was ...
preparation Embodiment 1
[0153] Preparation Example 1: Poly 4-(2’,3’-glycidoxy)styrene (Polymer 1)
[0154]
[0155] Take 50ml of acetone as the solvent, add 12g of poly(p-hydroxystyrene) (number average molecular weight 3120, n=26) (0.1mol repeating unit) to the solvent, stir with electric, blow in nitrogen, and add 2.4g (0.06mol) of sodium hydroxide . The temperature of the resulting reaction mixture was controlled at 25° C., 16.65 g of epichlorohydrin (0.18 mol) was slowly added dropwise through a constant pressure dropping funnel, and the addition was completed within 0.5 hours, and then the resulting reaction mixture was reacted at 25° C. for 8 hours. After the reaction is completed, the undissolved inorganic matter is filtered off, the filtrate is distilled under reduced pressure, and the solvent and excess epichlorohydrin are evaporated to obtain a solid, which is washed three times with water, filtered and dried to obtain the product, which is analyzed as the title polymer.
[0156] The NMR data a...
preparation Embodiment 2
[0160] Preparation Example 2: Poly 3,5-dimethyl-4-(2’,3’-glycidoxy)styrene (polymer 2)
[0161]
[0162] Take 50ml of ethanol as the solvent, add 14.8g of poly 3,5-dimethyl-4-hydroxystyrene (number average molecular weight 4144, n=28) (0.1 mol repeating unit) to the solvent, stir it electrically, and blow in nitrogen. 5.6 g (0.1 mol) of potassium hydroxide was added. The temperature of the obtained reaction mixture was controlled at 20° C., 18.5 g of epichlorohydrin (0.2 mol) was slowly added dropwise through a constant pressure dropping funnel, and the addition was completed within 0.5 hours, and then the obtained reaction mixture was reacted at 25° C. for 8 hours. After the reaction is completed, the undissolved inorganic matter is filtered off, the filtrate is distilled under reduced pressure, and the solvent and excess epichlorohydrin are evaporated to obtain a solid, which is washed three times with water, filtered and dried to obtain the product, which is analyzed as the ti...
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