The invention discloses deuterated estazolam and a preparation method thereof. The preparation method comprises following steps of (1) adding 6-phenyl-8-chlorine-4H-[1,2,4] triazole-[4,3-a][1,4] benzo-diazepine into dimethyl sulfoxide or N,N-dimethylformamide, mixing and stirring; (2) adding a catalyst cesium carbonate or potassium carbonate as well as deuterated chloroform, stirring and heating up to over 40DEG C; and (3) separating so as to obtain deuterated estazolam. The preparation method is concise, is simple and convenient to operate, has low cost, and is easy for purification. Commercially available non-deuterated estazolam can be converted into deuterated estazolam by a little deuterated reagent used as a deuterium source in the non-deuterated solvent atmosphere in shorter time, and a pure product can be obtained through simple purification by column chromatography. The standard deuterated estazolam prepared by the method has high purity and stable chemical property, and is convenient for preparing standard substances for analysis. The preparation method can be used for producing, analyzing and detecting the deuterated internal standard substance used by estazolam.