Pretreatment process of vacuum ruthenium plating technology

A kind of pretreatment and technical technology, applied in the direction of vacuum evaporation plating, metal material coating process, sputtering plating, etc., can solve the problems of high pollution, poor adhesion effect, etc., to reduce oxygen content, connect The effect is uniform and strong, and the effect of increasing firmness

Inactive Publication Date: 2018-10-23
江苏时代华宜电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the problems in the prior art, the present invention provides a pretreatment process of vacuum ruthenium plating technology, which solves the problems of high pollution and poor adhesion effect in the prior art, and uses alkaline electrolysis + mixed pickling + plasma cleaning Combined technology to effectively improve the cleanliness of the surface of the molybdenum sheet and improve the bonding force between the molybdenum sheet and the ruthenium layer

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  • Pretreatment process of vacuum ruthenium plating technology
  • Pretreatment process of vacuum ruthenium plating technology
  • Pretreatment process of vacuum ruthenium plating technology

Examples

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Effect test

Embodiment 1

[0028] A pretreatment process of vacuum ruthenium plating technology, according to the following steps:

[0029] Step 1, put the molybdenum sheet into the electrolytic cell for electrolytic degreasing reaction, and then rinse it with pure water;

[0030] The electrolytic solution in the electrolytic cell adopts mixed lye, and described mixed lye is mixed by sodium hydroxide solution and sodium carbonate solution, and the concentration of sodium hydroxide in described mixed lye is 10g / L, and the concentration of sodium carbonate is 20g / L. L; the temperature of the electrolytic degreasing is 70°C, the time is 2min, and the current density of the electrolytic degreasing is 50mA / cm 2 ;

[0031] Step 2, adding the rinsed molybdenum sheet into the mixed acid solution for surface film removal treatment, and rinsing with pure water after treatment;

[0032] The mixed acid solution adopts a mixture of hydrochloric acid, sulfuric acid and water, and the mass ratio of hydrochloric acid...

Embodiment 2

[0038] A pretreatment process of vacuum ruthenium plating technology, according to the following steps:

[0039] Step 1, put the molybdenum sheet into the electrolytic cell for electrolytic degreasing reaction, and then rinse it with pure water;

[0040] The electrolytic solution in the electrolytic cell adopts mixed lye, and described mixed lye is mixed by sodium hydroxide solution and sodium carbonate solution, and the concentration of sodium hydroxide in described mixed lye is 20g / L, and the concentration of sodium carbonate is 30g / L. L; the temperature of the electrolytic degreasing is 70°C, the time is 2min, and the current density of the electrolytic degreasing is 50mA / cm 2 ;

[0041] Step 2, adding the rinsed molybdenum sheet into the mixed acid solution for surface film removal treatment, and rinsing with pure water after treatment;

[0042] The mixed acid solution adopts a mixture of hydrochloric acid, sulfuric acid and water, and the mass ratio of hydrochloric acid...

Embodiment 3

[0048] A pretreatment process of vacuum ruthenium plating technology, according to the following steps:

[0049] Step 1, put the molybdenum sheet into the electrolytic cell for electrolytic degreasing reaction, and then rinse it with pure water;

[0050] The electrolytic solution in the electrolytic cell adopts mixed lye, and described mixed lye is mixed by sodium hydroxide solution and sodium carbonate solution, and the concentration of sodium hydroxide in described mixed lye is 20g / L, and the concentration of sodium carbonate is 30g / L. L; the temperature of the electrolytic degreasing is 70°C, the time is 2min, and the current density of the electrolytic degreasing is 50mA / cm 2 ;

[0051] Step 2, adding the rinsed molybdenum sheet into the mixed acid solution for surface film removal treatment, and rinsing with pure water after treatment;

[0052] The mixed acid solution adopts a mixture of hydrochloric acid, sulfuric acid and water, and the mass ratio of hydrochloric acid, ...

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Abstract

The invention belongs to a ruthenium plating technical process and particularly relates to a pretreatment process of a vacuum ruthenium plating technology. The pretreatment process comprises the following steps that 1, a molybdenum sheet is placed into an electrolytic tank to be subjected to an electrolytic degreasing reaction and then is washed out through pure water; 2, the washed molybdenum sheet is added into mixed acid liquor to be subjected to surface film removing treatment and then washed out through pure water; 3, the molybdenum sheet subjected to film removing treatment is placed into vacuum equipment to be subjected to a vacuumizing heating reaction; and 4, the temperature is constant, the molybdenum sheet is subjected to plasma cleaning, and after cleaning is finished, the pretreated molybdenum sheet is obtained in a cooled mode. The problems that in the prior art, pollution is large, and the adhesion effect is poor are solved, through an alkali electrolysis plus mixed acidcleaning plus plasma cleaning combined technology, the cleanliness degree of the surface of the molybdenum sheet is effectively increased, and binding force between the molybdenum sheet and a ruthenium layer is increased.

Description

technical field [0001] The invention belongs to the technical process of ruthenium plating, and in particular relates to a pretreatment process of vacuum ruthenium plating technology. Background technique [0002] At present, there are many factors affecting the quality of the magnetron sputtering coating film, voltage, power, argon gas pressure, molybdenum sheet surface condition, etc. all have a great influence on the film formation, and among them, the molybdenum sheet surface condition is the most important , if the surface oxidation degree of the molybdenum sheet is high, and there are many organic substances such as grease, it will have an unimaginable impact on the surface bonding force, corrosion resistance and electrical properties after ruthenium plating. Not only will the molybdenum sheet coating fall off, but the oxygen content If it is too high, the surface resistance will increase and the electrical performance will decrease. Since the vacuum coating cannot be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/20
CPCC23C14/021C23C14/022C23C14/205
Inventor 郭顺华陈敏
Owner 江苏时代华宜电子科技有限公司
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