Nondestructive cleaning method for laser gyroscope cavity after optical machining

Abstract

The invention discloses a nondestructive cleaning method for a laser gyroscope cavity after optical machining. Through pretreatment and the cleaning mode of combination of sequential soaking in organic liquid I and organic liquid II and ultrasonic cleaning, rosin cerate and protective paint on the cavity surface and in holes are effectively removed; after rinsing, water-based liquid I is used fordecomposing residual organic pollutants into small molecules which are easy to remove, meanwhile, residual polishing powder is dissolved into soluble metal complexing ions; then, water-based liquid IIis utilized to oxidize other metal particles into ions, and the ions are dissolved into a liquid to be removed; and finally, through anhydrous ethanol dehydration and the mode of cooperation of high-purity nitrogen and ion air gun dry-blowing, static electricity on the surface of the cavity is eliminated, thus re-adsorption of the pollutants is avoided, and high-cleanliness cleaning of the cavityafter optical machining is achieved. According to the nondestructive cleaning method, no strong acid or strong alkali is adopted, the roughness and finish degree of the cleaned optical surface are not changed, the high-airtightness adjustment requirement for the laser gyroscope resonant cavity can be met, and the cavity is cleaned nondestructively.

Description

technical field [0001] The invention belongs to the technical field of optical processing, and relates to a non-destructive cleaning method after optical processing of a laser gyroscope cavity. Background technique [0002] Laser gyro cavity processing is a relatively complicated cold processing process, which requires many kinds of auxiliary materials (such as polishing glue, polishing powder, hot melt, organic solvents, protective coatings, etc.), in order to remove processing auxiliary materials and obtain a clean optical surface, it is necessary to Clean the laser gyro cavity after processing. Traditional optical cleaning, such as the cleaning method described in patents CN 106590974 A and CN 103721969A, is mainly for routine cleaning to ensure the imaging quality of the lens and the quality of the optical surface coating, while the cleaning of the laser gyro cavity is to ensure the vacuum performance of the product, anti- Space temperature changes and vibration shock p...

AI Technical Summary

Problems solved by technology

Traditional optical cleaning, such as the cleaning method described in patents CN 106590974 A and CN 103721969A, is mainly for routine cleaning to ensure the imaging quality of the lens and the quality of the optical surface coating, while the cleaning of the laser gyro cavity is to ensure the vacuum performance of the product, anti- Space temperature changes and vibration shock performance, any pollutants on the surface of the cavity will reduce the adhesion between other parts and the cavity, affect the high vacuum sealing of the resonator, and reduce the service life and accuracy of the laser gyroscope, so its cleaning process The requirements for surface cleanliness are much higher than traditional processes

[0003] In addition, the laser gyro cavity uses ultra-low expansion glass-ceramic as the body material. The glass-ceramic is composed of a glass phase and a microcrystalline phase uniformly distributed in the glass phase. The main crystal phase contains SiO 2 、A1 2 o 3 , Li 2 O, MgO, P 2 o 3 and other complex components, so glass-ceramics has poor chemical stability to general acidic and alkaline cleaning agents, and the cleaning methods described in patents CN 107755388 A and CN 102517594 A, etc. that do not damage ordinary quartz glass are also not suitable for this Such materials, because the cleaning components such as hydrofluoric acid and sodium hydroxide used in the above cleaning process will cause corrosion on the microcrystalline surface and damage the quality of the smooth surface

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