A kind of silver tin oxide composite coating and preparation method thereof
A composite coating, silver tin oxide technology, applied in the coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of large internal stress of the film, poor bonding of the film base, and difficult film formation, etc., to achieve the process Less, promote crystallization, good film-base binding effect
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[0028] The preparation method of silver-tin oxide composite coating of the present invention comprises the following steps:
[0029] 1) Mechanically polish the surface of the substrate until the roughness Ra is less than 0.2 μm, ultrasonically in alcohol for 10 minutes, and blow dry with nitrogen;
[0030] 2) Place the substrate on the sample tray in the vacuum chamber, and at the same time put nickel targets, chromium targets, silver targets, and tin oxide targets in the chamber; vacuumize the chamber to the specified background vacuum degree of 1×10 -4 Pa; Introduce argon gas into the chamber and adjust the air pressure to 2Pa. After cleaning the surface of the substrate with a radio frequency power supply glow for 30 minutes at a power of 300W, turn off the radio frequency power supply;
[0031] 3) Make the sample disk rotate at a constant speed of 20 rpm, adjust the bias voltage to -70V and the air pressure to 0.3Pa, turn on the power supply of the chromium and nickel targ...
Embodiment 1
[0036] Select pure copper with a density of 100% as the substrate, perform mechanical polishing on the surface to a roughness Ra of 0.18 μm, and dry it with nitrogen after ultrasonication in alcohol for 10 minutes; place the copper substrate on the sample plate of the vacuum chamber, and install it in the chamber. Put nickel target, chromium target, silver target, tin oxide target; vacuumize the chamber to the background vacuum degree of 1×10 -4Pa, then pass in argon gas and adjust the air pressure to 2Pa, turn on the radio frequency power supply and adjust the power to 300W, until the glow cleans the surface of the copper substrate for 30 minutes after ignition, then turn off the radio frequency power supply. Turn on the rotating power supply of the sample disk to make it rotate at a constant speed of 20 rpm, adjust the bias voltage to -70V and the air pressure to 0.3Pa, turn on the power supply of the chromium target and adjust it to 200W, after 120s of deposition (the first ...
Embodiment 2
[0039] Select pure silver with a density of 99% as the substrate, perform mechanical polishing on the surface until the roughness Ra is 0.15um, and blow it dry with nitrogen after ultrasonication in alcohol for 10 minutes; place the copper substrate on the sample plate of the vacuum chamber, and install it in the chamber Put nickel target, chromium target, silver target, tin oxide target; vacuumize the chamber to the background vacuum degree of 1×10 -4 Pa, then pass in argon gas and adjust the air pressure to 2Pa, turn on the radio frequency power supply and adjust the power to 300W, until the glow cleans the surface of the copper substrate for 30 minutes after ignition, then turn off the radio frequency power supply. Turn on the rotating power supply of the sample disk to make it rotate at a constant speed of 20 rpm, adjust the bias voltage to -70V and the air pressure to 0.3Pa, turn on the power supply of the chromium target and adjust it to 200W, after 60s of deposition (the...
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