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High-performance ceramic coating, preparation method thereof and application

A ceramic coating, high-performance technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of uniform coating on the surface of workpiece, low bonding strength of film base, poor material controllability, etc. , to achieve the effect of strong bonding force of the film base, low processing temperature, and not easy to peel off.

Inactive Publication Date: 2019-08-02
SOUTH CHINA UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a high-performance ceramic coating and its preparation method and application. This method is mainly aimed at the poor material controllability, low bonding strength of the film base, and difficulty in complex workpieces in the traditional plating method of ceramic coatings. To solve the problem of uniform coating deposition on the surface, it is proposed to use a composite technology combining metal ion implantation and gas ion infiltration to prepare

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  • High-performance ceramic coating, preparation method thereof and application
  • High-performance ceramic coating, preparation method thereof and application
  • High-performance ceramic coating, preparation method thereof and application

Examples

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Embodiment 1

[0030] In this example, CeO is prepared on the surface of magnesium substrate. 2 ceramic coating. Before the experiment, the substrate 1 was cleaned with alcohol, and after drying, it was placed in a vacuum chamber and bombarded with Ar ions to remove surface contamination. Coating preparation process such as figure 1 shown. First, the MEVVA ion source uses metal vacuum arc discharge to generate high-density Ce ions, which are extracted by the electrode extraction system and accelerated to become energy-carrying ion beams. The injection voltage is 100 kV. The energetic ion beam implants Ce ions into the surface of the substrate 1 , and the cerium element is distributed in a gradient in the substrate 1 to form the metal coating 2 . During injection, the vacuum chamber pressure was 10 -3 Pa, Ce ion implantation dose is 10 16 icon·cm -2 , the beam density is 250 μA / cm 2 , and the injection time was 90 min. By controlling the Ce ion implantation dose, implantation energy...

Embodiment 2

[0033]In this example, the preparation method of the high-performance ceramic coating is applied to the energy industry, and an aluminum oxide coating is plated on the inner surface of the hydrogen storage tank.

[0034] Steel (Q345R) is generally used as the material of the hydrogen storage tank. However, during the storage of hydrogen, hydrogen atoms tend to diffuse into the steel and eventually become hydrogen molecules, which generate pressure inside the material and cause stress concentration. If the strength limit of the steel is exceeded, small cracks will be generated inside the steel, which will eventually lead to fracture, that is, hydrogen embrittlement. Al plating on the inner surface of the hydrogen storage tank 2 o 3 Ceramic coatings can effectively prevent hydrogen embrittlement from occurring. The diffusion process of hydrogen in the alumina coating requires a certain amount of energy to break the bond between aluminum and oxygen, and then play a good role in...

Embodiment 3

[0037] In this embodiment, the method for preparing a high-performance ceramic coating is applied to the semiconductor field, and an AlN coating is plated on the surface of the Invar alloy.

[0038] AlN has high breakdown field strength, high thermal conductivity, high resistivity, high chemical and high thermal stability, and is a good semiconductor material. The method of this example is similar to that of Example 1. Firstly, Al ions are implanted on the surface of Invar alloy by MEVVA ion source technology, and then N element is infiltrated on the surface of the treated substrate by ion infiltration technology to generate 10 μm AlN with gradient structure in situ. ceramic coating. During injection, the vacuum chamber pressure was 10 -3 Pa, MEVVA ion source implantation voltage is 200 kV, Al ion implantation dose is 10 17 icon·cm -2 , the beam density is 500 μA / cm 2 , and the injection time was 180 min. During the ionization process, a bias voltage of -500 V was applie...

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Abstract

The invention discloses a high-performance ceramic coating, a preparation method thereof and application. According to the preparation method, mainly for the problems that a traditional plating methodfor ceramic coatings is poor in material controllability and low in film-substrate bonding strength and it is difficult to form uniform coatings on surfaces of complex workpieces, the manner of conducting preparation through the metal ion injection and gas ion permeation combined composite technology is put forward. The preparation method specifically includes the following steps that firstly, amatrix is pre-treated, and then metal ions are injected in the surface of the matrix through metal ion injection to form a metal coating; and secondly, N, C or O ions permeate the surface of the metalcoating in the first step through gas ion permeation, and the high-performance ceramic coating is generated in situ. The bonding strength of the ceramic coating prepared through the method and a substrate is high, components of the coating are controllable, base materials are wide in applicability, and uniform deposition can be achieved on the surfaces of the complex workpieces.

Description

technical field [0001] The invention relates to the field of material surface treatment, in particular to a high-performance ceramic coating and its preparation method and application. Background technique [0002] On the basis of maintaining the structural strength of the original substrate, the high-performance ceramic coating adds the excellent characteristics of high-temperature inorganic materials such as high-temperature resistance, wear resistance, and chemical corrosion resistance, which can solve the problems of high-tech application materials. Problems such as heat resistance, easy corrosion, and non-wear resistance are one of the most promising new high-temperature materials at present, and have attracted extensive attention from industry and academia. [0003] There are many kinds of ceramic coatings and various preparation methods, including: thermal spraying method, sol-gel method, self-propagating high-temperature synthesis method, EDM deposition method, che...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/48C23C14/58
CPCC23C14/48C23C14/5846C23C14/5853C23C14/586
Inventor 肖舒石科军周池楼吴昊陈国华童煜凯郑益然
Owner SOUTH CHINA UNIV OF TECH
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