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A kind of bonding silver wire material with high spheroidity and preparation method thereof

A ball forming and silver wire technology, which is applied in semiconductor/solid-state device manufacturing, circuits, electric solid-state devices, etc., can solve the problem of affecting the stability and work efficiency of components used, increasing production costs and use costs, and insufficient mechanical properties, etc. problems, to achieve the effect of improving chemical stability and mechanical properties, excellent ball forming, excellent elongation and breaking load

Active Publication Date: 2020-10-16
广东佳博电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the current research progress on bonding wire materials, the development of bonding copper wire products is relatively good. Although the price of bonding copper wire products has an advantage, it has problems such as poor oxidation resistance and insufficient mechanical properties, which will affect the use. The stability and working efficiency of the components increase the production cost and use cost, and the high hardness will cause damage to the chip and affect the yield
[0005] Metal silver has the characteristics of excellent electrical conductivity, its resistivity is 1.586μΩ·cm, which is the smallest among all metals, and it also has relatively good heat dissipation performance, but pure silver is easily oxidized in the atmosphere, and when it is melted into a ball, the surface of the ball is not smooth As a result, its service life is not long, and the mechanical properties of pure silver are relatively poor, and its ductility is poor.

Method used

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  • A kind of bonding silver wire material with high spheroidity and preparation method thereof
  • A kind of bonding silver wire material with high spheroidity and preparation method thereof
  • A kind of bonding silver wire material with high spheroidity and preparation method thereof

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Effect test

Embodiment 1

[0031] A kind of preparation method of bonding silver wire material with high spheroidity:

[0032] 1) Pretreatment: Grind each metal substance into powder and sieve, then preheat to 50-60°C for vacuum drying, and use carbon monoxide to deoxidize the metal substance;

[0033] 2) Preparation of silver-nickel-calcium melt: take metallic silver 20% ± 0.2%, nickel 0.4% ± 0.04% and calcium 0.01% ± 0.001%, mix them into a silicon nitride crucible, adopt vacuum melting, and the vacuum pressure is 10 -2 ~10 -4 Pa, the initial melting temperature is raised to 780-810°C and maintained for 10-30 minutes, then raised to 900-950°C and maintained for 10-50 minutes, then raised to 1300-1400°C and maintained for 20-60 minutes, the whole process The heating rate is 110-350°C / h, and the silver-nickel-calcium melt is obtained after melting;

[0034] 3) Preparation of silver palladium lanthanum melt: take metallic silver 20% ± 0.2%, palladium 0.03% ± 0.004% and lanthanum 0.01% ± 0.001%, mix the...

Embodiment 2

[0041] A kind of preparation method of bonding silver wire material with high spheroidity:

[0042] 1) Pretreatment: Grind each metal substance into powder and sieve, then preheat to 50-60°C for vacuum drying, and use activated carbon to deoxidize the metal substance;

[0043] 2) Preparation of silver-nickel-calcium melt: take metallic silver 20% ± 0.2%, nickel 0.4% ± 0.04% and calcium 0.01% ± 0.001%, mix them into a silicon carbide crucible, adopt vacuum melting, and the vacuum pressure is 10 -2 ~10 -4 Pa, the initial melting temperature is raised to 780-810°C and maintained for 10-30 minutes, then raised to 900-950°C and maintained for 10-50 minutes, then raised to 1300-1400°C and maintained for 20-60 minutes, the whole process The heating rate is 110-350°C / h, and the silver-nickel-calcium melt is obtained after melting;

[0044] 3) Preparation of silver-palladium-lanthanum melt: take metallic silver 20% ± 0.2%, palladium 0.03% ± 0.004% and lanthanum 0.01% ± 0.001%, mix th...

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Abstract

The invention belongs to the technical field of bonding wire materials, and relates to a high spherical bonding silver wire material and a preparation method thereof. The composition of the material comprises silver 99%±0.2%, nickel 0.4%±0.04%, and cobalt 0.4% ±0.05%, calcium 0.01%±0.001%, copper 0.01%±0.001%, gold 0.03%±0.004%, palladium 0.03%±0.004%, lanthanum 0.01%±0.001% and lead 0.0025%±0.0005%, also including other trace amounts The elements include one or more of indium, cerium, yttrium, and selenium. The preparation method of the bonding silver wire material of the present invention makes each metal component melt and synthesizes separately by steps, so that the crystal grains of each component are fully matched during the synthesis process of the bonding silver wire material, and the spheroidization of the synthesized bonding silver wire is improved. , in order to improve the chemical stability and mechanical properties of the alloy wire material.

Description

technical field [0001] The invention belongs to the technical field of bonding wire materials, and in particular relates to a bonding silver wire material with high ball forming property and a preparation method thereof. Background technique [0002] In recent years, the development of semiconductors has attracted more and more attention, and its development has become more and more rapid. The integration requirements of integrated circuits have become higher and higher. Therefore, the requirements for the chemical and mechanical properties of bonding gold wire materials are also very high. Under normal circumstances, the bonding gold wire needs to have high electrical conductivity, excellent chemical stability and plasticity, and must also have a specified tensile strength and elongation. The ideal bonding gold wire material generally has the following characteristics: the bonding gold wire can be combined with The lead material outside the pad achieves good bonding; the bo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C5/06C22C1/02C22F1/14C22F1/02H01L23/49H01L21/48
CPCC22C5/06C22C1/02C22F1/14C22F1/02H01L24/45H01L21/4885H01L2224/43848H01L2224/4321H01L2224/48463H01L2224/45139H01L24/43H01L2924/01049
Inventor 周钢
Owner 广东佳博电子科技有限公司
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