Method for preparing large-area continuous single-layer monocrystal graphene film
A technology of single crystal graphene and graphene, which is applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., and can solve problems such as affecting electron transmission and graphene film damage
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Embodiment 1
[0052] First, prepare the single crystal copper (111) surface
[0053]In the first step, the 100 μm thick commercial copper foil (purity 99.9%) is cut into a size of about 4cm × 6cm, and electrochemically polished in an ethanol / phosphoric acid system (wherein, the specific composition of the polishing solution is: deionized water ( mL), phosphoric acid (mL), ethanol (mL), isopropanol (mL) and urea (g) were mixed according to the ratio of 250:125:125:25:4; the condition of electrochemical polishing was: the holding voltage was 5V, the current is 2A, and the polishing time is 3min.) Wash with deionized water to remove residual polishing liquid on the surface, and blow dry with nitrogen.
[0054] In the second step, the copper foil obtained in the first step is placed in a high-temperature tube furnace, and 200 sccm of argon gas and 100 sccm of hydrogen gas are introduced to start heating. The temperature of the tube furnace was raised to 1075°C, and the heating time was 45 minu...
Embodiment 2
[0060] Embodiment 2, verification of single crystal properties of graphene film
[0061] In order to verify the single crystallinity of the obtained graphene film, the judgment of the same orientation ratio of graphene islands before film formation and the experiment of local etching of the film after film formation were carried out. The results were respectively obtained by Figure 9 and Figure 10 exhibit. In the first step in this embodiment, the growth time is shortened from 1h to 40min after feeding methane, and the Figure 9 middle result. In this operation step, after the growth is over, keep the flow rate of argon and hydrogen constant, turn off methane, keep the temperature constant for 5 minutes, and then cool down naturally to obtain Figure 10 in the data. exist Figure 9 In , most of the graphene islands have the same orientation, which means that they have the same boundary pointing in the same direction, and all graphene islands are hexagonal single crystal...
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