Preparation method for ITO ceramic target material with controllable grain size
A technology of ceramic target material and grain size, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of coarse grain and poor uniformity, and achieve controllable grain size and high resistivity. The effects of low and excellent electrical and mechanical properties
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
preparation example Construction
[0034] In some embodiments, the method for preparing an ITO ceramic target with controllable grain size includes the following steps:
[0035] Slurry preparation step, that is, the mass fraction of In 2 o 3 Powder and SnO with a mass fraction of 10-3 2The powder is mixed with deionized water, diluent, binder and polymer materials in a sand mill to obtain an ITO ceramic slurry with a solid content of 70-80% and a viscosity of 120-300mpa.s material; the average particle size D50 of the mixed powder in the ITO ceramic slurry dispersed by a sand mill is controlled at 200-300nm; the mixed powder mentioned in this application refers to the 2 o 3 Powder and SnO 2 Powder mixture of powder; controlling the particle size of the mixed powder has a great influence on the performance of the product, especially the average particle size of the mixed powder is closely related to the grain size control of the ITO ceramic target, and the average particle size D50 is controlled at Between ...
Embodiment 1
[0057] In Example 1, the method for preparing an ITO ceramic target with controllable grain size includes:
[0058] Weigh 450g In respectively 2 o 3 Powder and 50g SnO 2 Powder; 9g polyacrylic acid, 2.5g gum arabic, 9g acrylamide and 125g deionized water to form a premix;
[0059] Add the two oxide powders and the premixed solution into the roller mill tank and mix them, mill for 1 hour, then transfer the slurry to a high-energy ball mill in a sand mill, and pump the vacuum degree of the ball mill tank to 9Pa to obtain the solid mass content of the powder It is 80% ITO slurry, and the average particle size distribution D50 of the mixed powder measured by the laser particle size analyzer is 200nm;
[0060] Inject the slurry into a gypsum mold and shape it under the condition of a pressure of 0.2MPa to obtain an ITO ceramic green body with a relative density of 62%;
[0061] Dry the ITO ceramic green body, and then put it into an integrated degreasing and sintering furnace. ...
Embodiment 2
[0064] In Example 2, the method for preparing an ITO ceramic target with controllable grain size includes:
[0065] Weigh 450g In respectively 2 o 3 Powder and 50g SnO 2 Powder; 9g polyacrylic acid, 2.5g gum arabic, 9g acrylamide and 125g deionized water to form a premix;
[0066]Add the two oxide powders and the premixed solution into the roller mill tank and mix them, mill for 1 hour, then transfer the slurry to a high-energy ball mill in a sand mill, and pump the vacuum degree of the ball mill tank to 9Pa to obtain the solid mass content of the powder It is 80% ITO slurry, and the average particle size distribution D50 of the mixed powder measured by the laser particle size analyzer is 200nm;
[0067] Inject the slurry into a gypsum mold and shape it under the condition of a pressure of 0.2MPa to obtain an ITO ceramic green body with a relative density of 62%;
[0068] Dry the ITO ceramic green body, and then put it into an integrated degreasing and sintering furnace. T...
PUM
| Property | Measurement | Unit |
|---|---|---|
| viscosity | aaaaa | aaaaa |
| particle size | aaaaa | aaaaa |
| electrical resistivity | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More