Composite protective film with silane transition layer, preparation method thereof and product
A technology of transition layer and protective film, which is applied in the direction of coating, liquid coating device on the surface, surface pretreatment, etc. It can solve the problem of poor selectivity of raw material monomers, difficulty in meeting the protection requirements of electronic products, and affecting the protection of electronic products in the film layer Performance and other issues, to achieve the effect of low preparation temperature and good protection performance
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[0057] According to an embodiment of the present invention, the preparation method includes the following steps:
[0058] 1) Substrate preparation
[0059] Before performing chemical vapor deposition on the substrate, the substrate needs to be cleaned. Dust, moisture or grease on the surface of the substrate will have an adverse effect on the deposition effect. The substrate can be cleaned with acetone or isopropanol first, and then dried in a drying oven.
[0060] 2) Prepare the silane transition layer by chemical vapor deposition on the substrate
[0061] (1) Place the substrate in the reaction chamber of the reaction device, evacuate to 10-200 mTorr, and feed auxiliary gas, such as He, Ar, O 2 or a mixture of several gases.
[0062] (2) Feed silane raw material or monomer vapor doped with corrosion inhibitor into the reaction chamber, and start plasma discharge, and perform chemical vapor deposition to form the silane transition layer on the surface of the substrate.
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Embodiment 1
[0087] In the coating preparation method of a kind of silane composite membrane as self-repairing transition layer among the present invention, through following steps:
[0088] (1) Place the circuit board (6cm×3cm), Fe sheet (30*20*2mm), Mg sheet (30*20*2mm) in the 500L plasma reaction device, and continuously Evacuate to achieve a vacuum of 200 mTorr and a chamber temperature of 30 °C.
[0089] (2) Oxygen is introduced, the flow rate is 120 sccm, and the radio frequency plasma discharge is turned on to pretreat the substrate. The discharge power in the pretreatment stage is 120 W, and the discharge lasts for 60 s.
[0090] (3) 5% lanthanum nitrate (inorganic slow-release agent) (dissolved in isopropanol (organic solvent)) and hexamethylcyclotrisiloxane (hydrophobic silane) and ureidopropyltrimethyl trimethylate are simultaneously passed through the Y-shaped tee Oxysilane (hydrophilic silane) (1:1), chemical vapor deposition on the surface of the substrate to prepare the tra...
Embodiment 2
[0094] In the coating preparation method of a kind of silane composite membrane as self-repairing transition layer among the present invention, through following steps:
[0095] (1) Place the circuit board (6cm×3cm), Fe sheet (30*20*2mm), Mg sheet (30*20*2mm) in the 500L plasma reaction device, and continuously Evacuate to achieve a vacuum of 50 mTorr and a chamber temperature of 45 °C.
[0096] (2) Introduce argon gas with a flow rate of 5 sccm, and turn on microwave discharge to pretreat the substrate. The discharge power in this pretreatment stage is 500W, and the discharge lasts for 200s.
[0097] (3) 5% cerium nitrate (dissolved in water) (inorganic corrosion inhibitor) and octamethylcyclotetrasiloxane (hydrophobic silane) are passed through the Y-shaped tee at the same time, and the transition layer is prepared by chemical vapor deposition on the surface of the substrate . During the preparation of the transition layer, the flow rates of the two monomers were 100 μL / mi...
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