Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Device and method for preparing amorphous diamond film, amorphous diamond film and composite coating of amorphous diamond film

A diamond film, amorphous technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problems of low energy of coating particles, unfavorable amorphous diamond film performance, etc., to achieve improved service life, good performance The effect of infrared light transmittance and high diamond phase content

Active Publication Date: 2020-10-13
佛山耐信涂层技术有限公司
View PDF8 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the energy of coating particles produced by the existing magnetron sputtering method and filtered cathodic arc method is low, which is not conducive to improving the performance of amorphous diamond film

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device and method for preparing amorphous diamond film, amorphous diamond film and composite coating of amorphous diamond film
  • Device and method for preparing amorphous diamond film, amorphous diamond film and composite coating of amorphous diamond film
  • Device and method for preparing amorphous diamond film, amorphous diamond film and composite coating of amorphous diamond film

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0047]The device for preparing an amorphous diamond film provided by the present invention includes an arc starting device; the arc starting device includes a cathode graphite target 1, an arc power supply 2 connected to the cathode graphite target 1, and an annular anode positioned outside the cathode graphite target 1 3. An arc starting mechanism 4 connected to the annular anode 3; a negative bias power supply 5 is provided near 1 on the periphery of the annular anode 3. In the present invention, the purity of the cathode graphite target 1 is preferably 99.999%, and the density is preferably ≥ 1.77g / cm 3 . In the present invention, the arc power supply 2 is preferably a DC power supply, and the arc power supply 2 is preferably grounded. The present invention has no special requirements on the specific type and model of the arc power source 2 , and the arc power source 2 well known to those skilled in the art can be used. In the present invention, the material of the annula...

Embodiment 1

[0080] The workpiece to be coated is a stainless steel sewing needle, and the coating method is as follows:

[0081] (1) Wipe the surface of the workpiece to be coated with deionized water and absolute ethanol in turn;

[0082] (2) the workpiece is put into an ultrasonic cleaner equipped with anhydrous ethanol solution for ultrasonic cleaning, the power is 200 watts, and the time is 10 minutes to remove impurities and oil stains on the surface of the workpiece;

[0083] (3) Put the workpiece to be coated into the coating chamber of the coating machine, and evacuate to 1.6×10 -4 Below Pa, turn on the power supply of the heating device to heat the workpiece, the workpiece heating temperature is 150°C, and the heating time is 90 minutes;

[0084] (4) It is 99.99% argon to pass into the vacuum chamber, the argon flow rate is 50 sccm, the power supply (voltage is 1500 volts) of the ion source is opened to generate high-energy argon plasma by argon ionization, and the bias power su...

Embodiment 2

[0088] The workpiece to be coated is a tungsten carbide cutting tool, and the coating method is as follows:

[0089] (1) Wipe the surface of the coated workpiece with deionized water and absolute ethanol in turn;

[0090] (2) the workpiece is put into an ultrasonic cleaner equipped with anhydrous ethanol solution for ultrasonic cleaning, the power is 200 watts, and the time is 30 minutes to remove impurities and oil stains on the surface of the workpiece;

[0091] (3) Put the workpiece to be coated into the coating chamber of the coating machine, and evacuate to 1.6×10 -4 Below Pa, turn on the power supply of the heating device to heat the workpiece. The workpiece heating temperature is 200°C and the heating time is 120 minutes;

[0092] (4) Into the vacuum chamber, the argon gas with a purity of 99.99% is introduced into the vacuum chamber, and the argon gas flow rate is 60 sccm, and the power supply of the ion source (voltage is 2000 volts) is turned on to ionize the argon ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides a device and method for preparing an amorphous diamond film, the amorphous diamond film and a composite coating of the amorphous diamond film, and belongs to the technical fieldof solid material surface modification treatment. The device for preparing the amorphous diamond film comprises an arcing device, a hollow filtering bent pipe 6 and a vacuum film coating cavity 11. By adding cathode bias to an annular anode 3 of the arcing device, carbon ions generated by a negative electrode graphite target material 1 can be accelerated, and therefore energy of the carbon ions is improved; by arranging the hollow filtering bent pipe 6, graphite particles generated during arc discharge deposit in the hollow filtering bent pipe 6, and therefore it is avoided that the graphiteparticles enter the vacuum film coating cavity 11 to affect the film coating quality; by disposing a magnetic deflection film 9 at the maximum bent position of the hollow filtering bent pipe 6, the carbon ions can be assisted in making wide-angle deflection, and therefore electricity consumed by current of a coil 8 is reduced; and meanwhile, by means of the magnetic deflection film 9, the deflection efficiency of the carbon ions can be improved, and therefore the film coating efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of surface modification treatment of solid materials, in particular to a device and method for preparing an amorphous diamond film, an amorphous diamond film and a composite coating thereof. Background technique [0002] SP between carbon atoms 3 The diamond phase is formed when the form combines, with SP 2 Forms combine to form a graphitic phase. Amorphous diamond film is a carbon film with a shapeless structure, which contains a large number of diamond phases and has a tetrahedral structure. Amorphous diamond films exhibit diamond-like properties, such as high hardness, wear resistance, chemical corrosion resistance, high thermal conductivity, etc., and have very good application prospects. [0003] At present, the preparation methods of amorphous diamond film mainly include physical vapor deposition (PVD) and chemical vapor deposition (CVD). The principle of the chemical vapor deposition method is to ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/02C23C14/32C23C14/35
CPCC23C14/022C23C14/0605C23C14/0611C23C14/325C23C14/35
Inventor 李标章黄裕祥
Owner 佛山耐信涂层技术有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com