Method for preparing anti-irradiation tungsten/copper coating on surface of low-activation steel
A low-activation steel and copper coating technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of easy falling off, large difference in thermal expansion coefficient between the substrate and tungsten, and achieve good repeatability, Excellent radiation resistance and simple preparation process
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Embodiment 1
[0026] In this embodiment, the method for preparing an anti-irradiation tungsten / copper coating on the surface of low-activation steel is as follows:
[0027] Step 1: Pretreatment of the substrate
[0028] Pass the RAFM steel matrix through 120 # 、320 # 、600 # , 800 # Silicon carbide sandpaper was ground and polished step by step to the mirror surface, and after ultrasonic cleaning and drying, a RAFM steel sample with a smooth surface was obtained;
[0029] Step 2: Preparation of copper interlayer
[0030] The RAFM steel sample and the copper target with a purity of 99.99% were installed in the magnetron sputtering chamber, and then evacuated to 2×10 -4 Pa (about 3 to 4 hours), pass in argon gas, adjust the flow rate of argon gas to 50 through the flowmeter, adjust the total working pressure to 2.5Pa, then turn on the DC sputtering switch, set the sputtering power to 40W, and pre-sputter After about ten minutes of sputtering, the sputtering program was started, and the s...
Embodiment 2
[0035] In this embodiment, the method for preparing an anti-irradiation tungsten / copper coating on the surface of low-activation steel is as follows:
[0036] Step 1: Pretreatment of the substrate
[0037] Pass the RAFM steel substrate through 120 # 、320 # 、600 # , 800 # Silicon carbide sandpaper was ground and polished step by step to the mirror surface, and after ultrasonic cleaning and drying, a RAFM steel sample with a smooth surface was obtained;
[0038] Step 2: Preparation of copper interlayer
[0039] The RAFM steel sample and the copper target with a purity of 99.99% were installed in the magnetron sputtering chamber, and then evacuated to 2×10 -4 Pa (about 3 to 4 hours), pass in argon gas, adjust the flow rate of argon gas to 50 through the flowmeter, adjust the total working pressure to 2.5Pa, then turn on the DC sputtering switch, set the sputtering power to 40W, and pre-sputter After about ten minutes of sputtering, the sputtering program was started, and th...
Embodiment 3
[0044] In this embodiment, the method for preparing an anti-irradiation tungsten / copper coating on the surface of low-activation steel is as follows:
[0045] Step 1: Pretreatment of the substrate
[0046] Pass the RAFM steel substrate through 120# 、320 # 、600 # , 800 # Silicon carbide sandpaper was ground and polished step by step to the mirror surface, and after ultrasonic cleaning and drying, a RAFM steel sample with a smooth surface was obtained;
[0047] Step 2: Preparation of copper interlayer
[0048] The RAFM steel sample and the copper target with a purity of 99.99% were installed in the magnetron sputtering chamber, and then evacuated to 2×10 -4 Pa (about 3 to 4 hours), pass in argon gas, adjust the flow rate of argon gas to 50 through the flowmeter, adjust the total working pressure to 2.5Pa, then turn on the DC sputtering switch, set the sputtering power to 40W, and pre-sputter After about ten minutes of sputtering, the sputtering program was started, and the ...
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Abstract
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