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In-situ preparation method and application of super-hydrophobic titanium film

An in-situ preparation and titanium thin film technology, which is applied in the field of metal surface engineering, can solve the problems of easy damage, poor substrate bonding, and affecting hydrophobicity, and achieve the effect of simple operation, low cost, and not easy to be damaged by mechanical effects

Pending Publication Date: 2020-11-17
JIANGSU UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Inorganic metal titanium is a hydrophilic material, and its hydrophobicity preparation first prepares a microscopic rough structure on the metal titanium, and then performs chemical modification with low surface energy substances. Most of the chemical modification materials are polymer compounds, which are poorly bonded to the matrix. Easily damaged which affects its hydrophobicity

Method used

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  • In-situ preparation method and application of super-hydrophobic titanium film
  • In-situ preparation method and application of super-hydrophobic titanium film
  • In-situ preparation method and application of super-hydrophobic titanium film

Examples

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Effect test

Embodiment 1

[0032] (1) Substrate preparation: Place the cut single-sided polished silicon wafers in acetone, ethanol and deionized water respectively for 15 minutes for ultrasonic cleaning, and the ultrasonic frequency is 100 Hz;

[0033] (2) Then fix the silicon wafer substrate cleaned in step (1) on the baffle, put it into the sample delivery room of the radio frequency magnetron sputtering equipment, and carry out vacuuming with a degree higher than 5×10 -3 Torr, then turn off the chamber vacuum pump;

[0034] (3) Target pre-sputtering: Pre-sputtering is performed on the titanium target, the titanium target is pure titanium with a purity of 99.99%; the vacuum degree of the chamber during pre-sputtering is higher than 2×10 -7 Torr, the voltage is 50V, the flow rate of high-purity argon gas is 20sccm, the working pressure is 3mTorr, the sputtering time is 30min, and the chamber temperature is cooled to 20°C after the sputtering is completed;

[0035] (4) Sample delivery: open the gate b...

Embodiment 2

[0042] The preparation process is the same as in Example 1, except that the heat treatment time is increased to 10s. The characterization method of the titanium film is the same as in Example 1, with a contact angle of 156° and a hardness of 8GPa.

Embodiment 3

[0044] The preparation process is the same as in Example 1, except that the heat treatment time is increased to 15s. The characterization method of the titanium film is the same as in Example 1, with a contact angle of 166° and a hardness of 8.5GPa.

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Abstract

The invention belongs to the technical field of metal surface engineering, and particularly relates to an in-situ preparation method and application of a super-hydrophobic titanium film. The in-situ preparation method comprises the following steps of (1) substrate preparation, specifically, fixing a silicon wafer substrate on a baffle plate, and performing vacuumizing; (2) pre-sputtering, specifically, vacuumizing a sputtering cavity, and carrying out pre-sputtering on a titanium target material; (3) sample feeding, specifically, feeding the pre-sputtered titanium target material to a sample table in the sputtering cavity, and adjusting the rotating speed; (4) cavity washing, specifically, opening an air inlet valve of the sputtering cavity, and adjusting the flow and the cleaning time ofhigh-purity argon; (5) sputtering, specifically, setting sputtering voltage, working pressure, sputtering time and high-purity argon flow for sputtering, and taking out a titanium film after cooling;and (6) heat treatment, specifically, carrying out pipe sealing heat treatment on the titanium film to obtain the super-hydrophobic titanium film. According to the preparation method, preparation of the super-hydrophobic titanium surface with a large area or a complex shape can be achieved, the super-hydrophobic titanium surface is stable in super-hydrophobic performance and good in mechanical property, and the super-hydrophobic titanium film can be applied to aerospace, ships, ocean engineering and biomedicine.

Description

technical field [0001] The invention belongs to the technical field of metal surface engineering, and in particular relates to an in-situ preparation method and application of a superhydrophobic titanium film. Background technique [0002] Titanium metal has low density, high specific strength, stable mechanical properties, and good biocompatibility. It has important applications in spacecraft, ships, marine engineering, biomedical equipment and other fields. With the deepening of research, titanium metal has also been promoted. To the chemical industry and daily necessities industry and other fields. However, wettability is an important indicator of the material surface, and the physical and chemical effects of the interface are all related to wettability, such as adsorption, dispersion, corrosion, etc. [0003] Superhydrophobicity is a special surface wettability, specifically referring to the property that the static contact angle between a solid surface and a water drop...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/16C23C14/02C23C14/58B82Y30/00B82Y40/00
CPCC23C14/35C23C14/165C23C14/021C23C14/025C23C14/5806C23C14/5853B82Y30/00B82Y40/00
Inventor 王泽陶佳虓叶炜钦吴昊徐紫玥陈菊芳叶霞杨晓红姚远远陆磊李小平
Owner JIANGSU UNIV OF TECH
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