Bionic cilium microsensor based on bistable potential energy adjustment and preparation method of bionic cilium microsensor

Abstract

The invention provides a bionic cilium microsensor based on bistable potential energy adjustment and a preparation method of the bionic cilium microsensor. The overall structure of the sensor is a multi-layer structure composed of cilia, an upper structure layer, a middle connecting layer and a lower supporting layer, wherein the upper structure layer comprises a suspension comb tooth fixing end,a folding beam, suspension comb teeth, detection comb teeth and modulation comb teeth. According to the invention, cilium columns and the upper structure layer are prepared on silicon on an insulatingsubstrate, and movement gaps are provided for the folding beam and the suspension comb teeth by etching the middle connecting layer. When the sensor works, the cilium columns drive the suspension comb teeth below to move in the flow velocity / shear stress direction, so that the gaps between the suspension comb teeth and the detection comb teeth are changed, and the flow velocity / shear stress is obtained according to the change of capacitance; when the flow velocity / shear stress is weak, the measurable displacement is obtained by applying a modulation voltage to the modulation comb teeth, enabling the potential energy of the system to be in a bistable state and adding a proper amount of white noise, namely, the capacitance change between the static comb teeth and the movable comb teeth canbe detected, and finally, the detection of a lower threshold value is realized.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, in particular to a bionic cilia microsensor based on bistable potential energy regulation. Background technique [0002] Flow velocity and wall shear stress sensors are important sensors in fluid measurement. They are widely used in environmental meteorological monitoring, process control of fluid transmission, flow field detection and active flow field control of aircraft and water vehicles. Traditional flow field measurement devices include hot wire anemometers, Doppler ultrasonic velocimeters, particle image velocimetry (PIV), etc., but they are large in size and complex in structure, making it difficult to meet the needs of high-precision online flow field engineering testing. In recent years, the development of microelectromechanical systems (MEMS) technology has provided a reliable technical approach for the preparation of sensors with small size and low power consumption. In ...

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Problems solved by technology

[0003] In 2017, Singapore and MIT research alliance Ajay Giri Prakash Kottapalli and others proposed in the paper "Cupula-Inspired Hyaluronic Acid-Based Hydrogel Encapsulation to Form Biomimetic MEMS Flow Sensors" published in "Sensors" (No. 8, 2017, 1728) A biomimetic flow rate sensor formed by hydrogel encapsulation, but the sensor adopts the piezoresistive principle and is sensitive to ambient temperature changes

[0004] In 2018, Yang Bo et al. from Southeast University proposed a resonant cilia in the paper "A novel flow sensor based on resonant sensing with two-stage microleverage mechanism" published in "Review of Scientific Instruments" (No. 4, 2018, 045002). Flow rate sensor, but for this type of sensor, for low-Q resonant sensors, due to the low amplification factor at the resonance frequency point, the general measurement circuit cannot separate the response signal from the noise

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