Bionic cilium microsensor based on bistable potential energy adjustment and preparation method of bionic cilium microsensor

A bistable, flow rate sensor technology, applied in the micro-electromechanical field, can solve the problems of sensitivity to environmental temperature changes, low magnification, inability to respond to signal and noise separation, etc., and achieve good zero drift, increased sensitivity, and improved measurement resolution. Effect

Active Publication Date: 2020-11-20
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

[0003] In 2017, Singapore and MIT research alliance Ajay Giri Prakash Kottapalli and others proposed in the paper "Cupula-Inspired Hyaluronic Acid-Based Hydrogel Encapsulation to Form Biomimetic MEMS Flow Sensors" published in "Sensors" (No. 8, 2017, 1728) A biomimetic flow rate sensor formed by hydrogel encapsulation, but the sensor adopts the piezoresistive principle and is sensitive to ambient temperature changes
[0004] In 2018, Yang Bo et al. from Southeast University proposed a resonant cilia in the paper "A novel flow sensor based on resonant sensing with two-stage microleverage mechanism" published in "Review of Scientific Instruments" (No. 4, 2018, 045002). Flow rate sensor, but for this type of sensor, for low-Q resonant sensors, due to the low amplification factor at the resonance frequency point, the general measurement circuit cannot separate the response signal from the noise

Method used

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  • Bionic cilium microsensor based on bistable potential energy adjustment and preparation method of bionic cilium microsensor
  • Bionic cilium microsensor based on bistable potential energy adjustment and preparation method of bionic cilium microsensor
  • Bionic cilium microsensor based on bistable potential energy adjustment and preparation method of bionic cilium microsensor

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Embodiment 1

[0063] This embodiment provides a method for preparing a bionic cilia flow rate flow direction MEMS sensor, which is manufactured by MEMS microfabrication technology, and the process flow is as follows Figure 4 As shown, the specific process operation is as follows:

[0064] (1) Prepare a double-throw conductive SOI sheet as a substrate, in RNH 3 ·H 2 O:H 2 o 2 :H 2 Soak in a solution of O=1:1:5 at 110°C for 15 minutes, then clean;

[0065] (2) Remove the oxide layer film on the back of the SOI sheet (such as the oxide layer on the back silicon surface), use HF:H 2 O=1:10 Prepare the solution, put the tablet in for about 10 minutes, take out the water, rinse it and dry it;

[0066] (3) Spin-coat HJ6030 positive resist with a thickness of about 6um on the device layer, after drying, use a photolithography machine to expose for about 45 seconds, and obtain a pattern after development;

[0067] (4) Use the SPTS deep silicon etching system to etch the back silicon 300um fo...

Embodiment 2

[0076] The present invention also provides another preparation method for preparing the above-mentioned bionic cilia flow rate MEMS sensor, the device is manufactured by MEMS technology, and the process flow is as follows Figure 5 As shown, the specific process operation is as follows:

[0077] (1) Prepare a double-throw conductive SOI sheet as a substrate, in RNH 3 ·H 2 O:H 2 o 2 :H 2 Soak in a solution of O=1:1:5 at 110°C for 15 minutes, then clean;

[0078] (2) sputtering Cr / Au on the upper surface of the silicon on the SOI sheet device layer;

[0079] (3) Spin-coat HJ6030 positive resist with a thickness of about 6um, after drying, use a photolithography machine to expose for about 45 seconds, and obtain graphics after development;

[0080] (4) Obtain the lead electrode pattern with ion beam etching, and then remove the glue;

[0081] (5) Spin-coat the photoresist again and expose and develop it to obtain a pattern. Use DRIE to etch Si about 60um, which takes about...

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Abstract

The invention provides a bionic cilium microsensor based on bistable potential energy adjustment and a preparation method of the bionic cilium microsensor. The overall structure of the sensor is a multi-layer structure composed of cilia, an upper structure layer, a middle connecting layer and a lower supporting layer, wherein the upper structure layer comprises a suspension comb tooth fixing end,a folding beam, suspension comb teeth, detection comb teeth and modulation comb teeth. According to the invention, cilium columns and the upper structure layer are prepared on silicon on an insulatingsubstrate, and movement gaps are provided for the folding beam and the suspension comb teeth by etching the middle connecting layer. When the sensor works, the cilium columns drive the suspension comb teeth below to move in the flow velocity / shear stress direction, so that the gaps between the suspension comb teeth and the detection comb teeth are changed, and the flow velocity / shear stress is obtained according to the change of capacitance; when the flow velocity / shear stress is weak, the measurable displacement is obtained by applying a modulation voltage to the modulation comb teeth, enabling the potential energy of the system to be in a bistable state and adding a proper amount of white noise, namely, the capacitance change between the static comb teeth and the movable comb teeth canbe detected, and finally, the detection of a lower threshold value is realized.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, in particular to a bionic cilia microsensor based on bistable potential energy regulation. Background technique [0002] Flow velocity and wall shear stress sensors are important sensors in fluid measurement. They are widely used in environmental meteorological monitoring, process control of fluid transmission, flow field detection and active flow field control of aircraft and water vehicles. Traditional flow field measurement devices include hot wire anemometers, Doppler ultrasonic velocimeters, particle image velocimetry (PIV), etc., but they are large in size and complex in structure, making it difficult to meet the needs of high-precision online flow field engineering testing. In recent years, the development of microelectromechanical systems (MEMS) technology has provided a reliable technical approach for the preparation of sensors with small size and low power consumption. In ...

Claims

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Application Information

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IPC IPC(8): G01P5/08G01L1/14B81B7/02B81C1/00
CPCG01P5/08G01L1/142B81B7/02B81C1/00015
Inventor 刘武梁贺龙许海军訾鹏
Owner SHANGHAI JIAO TONG UNIV
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