Preparation method of thermal interface material based on high-density graphene interconnection network structure
A thermal interface material and network structure technology, applied in heat exchange materials, chemical instruments and methods, etc., can solve problems such as affecting thermal conductivity, quality degradation, and difficulty in forming interconnected network structures, and achieve high quality and thermal conductivity, Reduce production costs and avoid the effect of dense distribution
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Embodiment 1
[0042] Embodiment 1: Step 1: adding fine copper powder with a particle size of 50 microns to the rectangular quartz boat with the upper opening customized;
[0043] Step 2: Carry out pre-sintering solidification and reduction of copper powder through chemical vapor deposition equipment. The process conditions are as follows: the temperature is raised to 1020 °C within one hour, and 200sccm: 60sccm argon: hydrogen gas mixture is introduced during the heating stage. get attached figure 2 Foam copper substrate in;
[0044] Step 3: After heating up, grow graphene on the surface of copper powder under the growth atmosphere of 40sccm methane, 160sccm hydrogen and 280sccm argon, the growth time is 2 hours, the growth temperature is 1020°C, the growth pressure is 800Pa, and further Sinter copper powder to improve its packing density;
[0045] Step 4: After the growth is over, turn off other gas sources, pass in 280sccm argon as a protection, and quickly cool down to obtain the atta...
Embodiment 2
[0050] Embodiment 2: Step 1: adding fine copper powder with a particle size of 50 microns to the rectangular quartz boat with the upper opening customized;
[0051] Step 2: Carry out pre-sintering solidification and reduction of copper powder through chemical vapor deposition equipment. The process conditions are as follows: the temperature is raised to 1020 °C within one hour, and 200sccm: 60sccm argon: hydrogen gas mixture is introduced during the heating stage. get attached figure 2 Foam copper substrate in;
[0052] Step 3: After heating up, grow graphene on the surface of copper powder under the growth atmosphere of 40sccm methane, 160sccm hydrogen and 280sccm argon. The growth time is 2 hours, the growth temperature is 1020°C, and the growth pressure is normal pressure. Copper powder is further sintered to improve its packing density;
[0053] Step 4: After the growth is over, turn off other gas sources, pass in 280sccm argon as a protection, and quickly cool down to ...
Embodiment 3
[0058] Embodiment 3: Step 1: adding fine copper powder with a particle size of 5 microns to the rectangular quartz boat with the upper opening customized;
[0059] Step 2: Carry out pre-sintering solidification and reduction of copper powder through chemical vapor deposition equipment. The process conditions are as follows: the temperature is raised to 1020 °C within one hour, and 200sccm: 60sccm argon: hydrogen gas mixture is introduced during the heating stage. get attached figure 2 Foam copper substrate in;
[0060] Step 3: After heating up, grow graphene on the surface of copper powder under the growth atmosphere of 40sccm methane, 160sccm hydrogen and 280sccm argon, the growth time is 2 hours, the growth temperature is 1020°C, the growth pressure is 800Pa, and further Sinter copper powder to improve its packing density;
[0061] Step 4: After the growth is over, turn off other gas sources, pass in 280sccm argon as a protection, and quickly cool down to obtain the attac...
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