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A kind of carbon/carbon composite material crucible with composite ceramic layer and preparation method thereof

A technology of carbon composite materials and composite ceramics, which is applied in the field of thermal field components for single crystal silicon drawing furnaces, can solve the problems of softening and deformation of quartz crucibles, high cost of single crystal silicon, and high cost of raw materials, so as to reduce thermal expansion coefficient and reduce raw materials The effect of simple cost and preparation process

Active Publication Date: 2022-05-24
HUNAN SHIXIN NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, considering the production environment of the single crystal silicon drawing furnace, on the one hand, the high temperature of molten silicon causes the quartz crucible to soften and deform; on the other hand, the gap between the quartz crucible and the C / C composite crucible and the inside of the The silicon material on the surface itself will remain part of the silicon material, which eventually leads to the silicon remaining on the inner surface of the quartz crucible during the process of changing the silicon from liquid to solid. At the same time, due to the volume expansion of silicon from liquid to solid, The combination between the quartz crucible and the C / C crucible is very tight, and the next furnace can only be drawn by breaking the old quartz crucible and replacing it with a new quartz crucible.
Due to the lack of raw materials for the production of quartz crucibles, and the high cost of artificially synthesized raw materials for the production of quartz crucibles, the cost of monocrystalline silicon produced by the current monocrystalline silicon pulling furnace is relatively high.

Method used

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  • A kind of carbon/carbon composite material crucible with composite ceramic layer and preparation method thereof
  • A kind of carbon/carbon composite material crucible with composite ceramic layer and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] like figure 1 As shown, a carbon / carbon composite material crucible with a composite ceramic layer of the present invention comprises a carbon / carbon composite material crucible base (11) and a composite ceramic layer (12) respectively attached to its inner surface, which is specifically prepared The steps are as follows:

[0046] Step 1, Preparation of Carbon Fiber Preforms

[0047] According to the shape and size requirements of the crucible, the conventional carbon fiber preform overall felt preparation method is adopted, the non-weft fabric and the mesh layer are alternately stacked, and then the density of 0.2g / cm is prepared by needle punching. 3 carbon fiber preforms;

[0048] Step 2, Densification of Carbon Fiber Preforms

[0049] The carbon fiber preform obtained in step 1 is densified by chemical vapor infiltration (CVI) and propylene as the gas source for chemical vapor deposition, and densified to a density of 1.1 g / cm 3 of carbon / carbon composites;

[...

Embodiment 2

[0067] Step 1, Preparation of Carbon Fiber Preforms

[0068] According to the shape and size requirements of the crucible, the conventional carbon fiber preform overall felt preparation method is used, the non-weft fabric and the mesh layer are alternately stacked, and then the density of 0.6g / cm is prepared by needle punching. 3 carbon fiber preforms;

[0069] Step 2, Densification of Carbon Fiber Preforms

[0070] First, the carbon fiber preform is impregnated-cured and carbonized by means of impregnating furan resin, and then chemical vapor infiltration (CVI) is used for it, using propylene as the gas source for chemical vapor deposition, the carbon fiber obtained in step 1. The preform is densified to a density of 1.4 g / cm 3 of carbon / carbon composites;

[0071] Step 3, machining

[0072] The carbon / carbon composite material obtained in step 2 is subjected to mechanical grinding treatment to obtain a carbon / carbon composite material crucible with a surface roughness Ra...

Embodiment 3

[0088] Step 1, Preparation of Carbon Fiber Preforms

[0089] According to the shape and size requirements of the crucible, the conventional carbon fiber preform overall felt preparation method is adopted, the non-weft fabric and the mesh layer are alternately stacked, and then the density of 0.4g / cm is prepared by needle punching 3 carbon fiber preforms;

[0090] Step 2, Densification of Carbon Fiber Preforms

[0091] First, the carbon fiber preform is impregnated-cured and carbonized by means of impregnating furan resin, and then chemical vapor infiltration (CVI) is used for it, using propylene as the gas source for chemical vapor deposition, and the carbon fiber obtained in step 1 The preform is densified to a density of 1.25 g / cm 3 of carbon / carbon composites;

[0092] Step 3, machining

[0093] The carbon / carbon composite material obtained in step 2 is subjected to mechanical grinding treatment to obtain a carbon / carbon composite material crucible with a surface roughn...

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Abstract

The invention discloses a carbon / carbon composite material crucible with a composite ceramic layer and a preparation method thereof. Composed of a composite ceramic layer on the surface, the thickness of the composite ceramic layer is 1 mm to 5 mm, and the composition of the composite ceramic layer is as follows in terms of mass ratio: 50% to 70% of silicon carbide, 10% to 40% of boron nitride , 10% to 20% silicon, the preparation method of the present invention, the carbon / carbon composite material crucible base body with composite ceramic layer adopts the split type preparation method, first prepares the composite ceramic layer green body, and then binds it with a binder, Then, through carbonization and siliconizing treatment, the carbon / carbon composite material crucible matrix and the composite ceramic layer are integrated. By adopting the preparation method of the present invention, a sufficiently thick composite ceramic layer can be obtained, thereby effectively inhibiting the impact of silicon vapor on the carbon / carbon layer. Erosion of composite crucible matrix.

Description

technical field [0001] The invention belongs to the technical field of thermal field components for single crystal silicon drawing furnaces, and in particular relates to a carbon / carbon composite crucible with a composite ceramic layer and a preparation method thereof. Background technique [0002] In recent years, with the depletion of fossil energy and people's requirements for energy conservation and environmental protection, the state vigorously advocates the development of the photovoltaic industry, and monocrystalline silicon solar cells are the most mature technology in the current photovoltaic technology field, and their photoelectric conversion efficiency is relatively high. Therefore, the current market demand for monocrystalline silicon is huge. [0003] The CZ (Czochralski, CZ method for short) method is used in the production of more than 80% of single crystal silicon, that is, it is prepared by seed crystal drawing in a single crystal silicon drawing furnace. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/83C04B35/52C04B35/622C04B41/87
CPCC04B35/83C04B35/52C04B35/622C04B41/87C04B41/5096C04B41/009C04B2235/422C04B2235/77C04B2235/96C04B41/5064C04B41/5059C04B41/45C04B41/0072
Inventor 鲍思权周娩红朱苏华
Owner HUNAN SHIXIN NEW MATERIALS CO LTD
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