Unlock instant, AI-driven research and patent intelligence for your innovation.

Resource utilization method for fluorine-containing waste liquid in integrated circuit industry

An integrated circuit, waste liquid technology, applied in the directions of alkali metal fluoride, fluorosilicic acid, halide silicon compound, etc., can solve the problems of high cost, easy to block pipeline, high labor intensity, etc., to achieve low processing cost, solve pollution , the effect of high economic value

Active Publication Date: 2021-09-07
GO HIGHER ENVIRONMENT GRP CO LTD +1
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the co-precipitation of sodium fluoride and calcium fluoride produced by this method remains in the sludge, which is easy to block the pipeline. High, discharged into the environment causing secondary pollution
[0005] Based on the above reasons, this application provides a low-cost and effective method for treating fluorine-containing waste liquid to solve its environmental pollution problem, and at the same time convert the active components of fluorine-containing waste liquid into recyclable resources, so as to achieve low-emission recycling. Sustainable Development Requirements

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Resource utilization method for fluorine-containing waste liquid in integrated circuit industry
  • Resource utilization method for fluorine-containing waste liquid in integrated circuit industry
  • Resource utilization method for fluorine-containing waste liquid in integrated circuit industry

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1~5 and comparative example 1~2

[0048] Examples 1-5 and Comparative Examples 1-2 treated the same batch of fluorine-containing waste liquid, and the detection results of the concentration of each substance in this batch of fluorine-containing waste liquid are shown in Table 1.

[0049] Table 1: The detection results of the concentration of each substance in the fluorine-containing waste liquid treated in Examples 1-5 and Comparative Examples 1-2

[0050]

[0051] Examples 1-5 and Comparative Examples 1-2 respectively treated 50Kg of fluorine-containing waste liquid.

[0052] Every 50Kg of fluorine-containing waste liquid contains 1.86Kg of fluorosilicic acid, and the theoretical output of sodium fluorosilicate based on fluorosilicic acid calculation is 2.427591Kg; fluorine-containing waste liquid contains 9Kg of F - , according to F - Calculate the theoretical output of sodium fluoride to be 19.892094Kg; contain 5.55Kg of nitric acid, calculate the theoretical output of sodium nitrate according to nitric...

Embodiment 6

[0070] The detection results of the concentrations of various substances in the fluorine-containing waste liquid treated in Example 6 are shown in Table 4, and the weight of this batch of fluorine-containing waste liquid treated is 50Kg.

[0071] Table 4: Detection results of the concentration of each substance in the fluorine-containing waste liquid treated in Example 6

[0072]

[0073] Table 5: The condition selection of processing step among the embodiment 6

[0074]

Embodiment 7

[0076] The detection results of the concentrations of various substances in the fluorine-containing waste liquid treated in Example 7 are shown in Table 6, and the weight of this batch of fluorine-containing waste liquid treated is 50Kg.

[0077] Table 6: Detection results of the concentration of each substance in the fluorine-containing waste liquid treated in Example 7

[0078]

[0079] Table 7: The condition selection of processing step among the embodiment 7

[0080]

[0081] It can be seen from Tables 1 to 7 that the resource utilization method of fluorine-containing waste liquid in the integrated circuit industry provided by this application is universal and applicable to the treatment of different fluorine-containing waste liquids.

[0082] Moreover, the purity of the sodium fluorosilicate products obtained in the above-mentioned Examples 1 to 7 meets the technical requirements of the first-class product in the national standard GB / T 23936-2018 (see Table 8 for sp...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the technical field of industrial wastewater treatment and resource recycling, and particularly discloses a method for resource utilization of fluorine-containing waste liquid in the integrated circuit industry. The method comprises the following steps: measuring the concentrations of SiF62-, F- and SO42- in the fluorine-containing waste liquid; adding an aqueous solution of sodium hydroxide into the fluorine-containing waste liquid for primary neutralization reaction to obtain primary treatment waste liquid and sodium fluosilicate; adding sodium hydroxide into the primary treatment waste liquid for secondary neutralization reaction to obtain secondary treatment waste liquid and sodium fluoride; evaporating and concentrating the secondary treatment waste liquid to separate out a precipitate containing sodium fluoride, so as to obtain the precipitate containing sodium fluoride and a tertiary treatment waste liquid; adding calcium nitrate into the third-time treatment waste liquid, and obtaining solid waste and fourth-time treatment waste liquid; and crystallizing the fourth-time treated waste liquid to obtain fifth-time treated waste liquid and sodium nitrate. Effective components of the fluorine-containing waste liquid are converted into recyclable resources, the problem of environmental pollution caused by the fluorine-containing waste liquid is solved, the treatment cost is low, and the value of resource products is high.

Description

technical field [0001] This application relates to the technical field of industrial wastewater treatment and resource recycling, in particular to the technical field of the treatment and recycling of fluorine-containing waste liquid in the integrated circuit industry, and more specifically, it relates to the recycling of fluorine-containing waste liquid in the integrated circuit industry method of use. Background technique [0002] In the process of wet etching and chemical mechanical grinding in the integrated circuit industry, a large amount of fluorine-containing waste liquid is produced, which contains 8-20% hydrofluoric acid, about 10% nitric acid, and also contains fluorosilicate ions, chloride ions, Impurity ions such as sulfate ions. This kind of waste liquid is highly corrosive and highly fat-soluble. It will not only cause severe burns to the skin of the human body, but also easily pass through the human body and combine with calcium and magnesium ions in the bod...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/10C01D3/02C01D9/12
CPCC01B33/103C01D3/02C01D9/12C01P2006/80
Inventor 陈福泰褚永前杨艳刘兴甜
Owner GO HIGHER ENVIRONMENT GRP CO LTD