Method for removing and recycling semiconductor deposits on surface of metal coating equipment
A technology of coating equipment and recycling method, which is applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using liquids, etc. Achieve the effect of ensuring high efficiency, no electrostatic sparks, and high density
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Embodiment 1
[0033] The cleaning object is crystalline silicon solar cell coating equipment, the material of the equipment is stainless steel, and the composition of the surface deposits is silicon carbide. Adjust the spray angle between the coating equipment with surface deposits and the nozzle of the spray gun to 5°, the spray pressure to 0.2Mpa, and spray granular sodium bicarbonate crystals with a particle size of about 20 μm to the surface of the coating equipment for deposition cleaning. Collect the jet debris mixture and add water to completely dissolve the sodium bicarbonate debris, then filter and recover the sediment powder material. SEM and energy spectrum detection found that the silicon carbide deposits on the surface of the coating equipment were completely removed after cleaning ( figure 1 ,Table 1). The C content decreased from 22.39% to 0.12%, and the Si content decreased from 76.37% to 0.10%. Comparative analysis of infrared spectra found that the infrared characterist...
Embodiment 2
[0037]The cleaning object is crystalline silicon solar cell coating equipment, the equipment material is aluminum, and the composition of the surface deposit is aluminum oxide. Adjust the spray angle between the coating equipment and the nozzle of the spray gun to 60°, the spray pressure to 1.0Mpa, and spray the granular sodium bicarbonate crystals with a particle size of about 500 μm to the surface of the coating equipment to clean the deposits. Collect the jet debris mixture and add water to completely dissolve the sodium bicarbonate debris, then filter and recover the sediment powder material. SEM and energy spectrum detection found that the aluminum oxide deposits on the surface of the coating equipment were completely removed after cleaning ( image 3 ,Table 2). The O content decreased from 21.13% to 0.05%, and the Al content increased from 78.76% to 99.95%.
[0038] Table 2 Comparison of element content on the surface of the aluminum coating equipment before and after ...
Embodiment 3
[0041] The cleaning object is crystalline silicon solar cell coating equipment, the equipment material is aluminum, and the composition of the surface deposit is silicon nitride. Adjust the spray angle between the coating equipment and the nozzle of the spray gun to 90°, the spray pressure is 3.0Mpa, and spray the granular sodium bicarbonate crystals with a particle size of about 1000 μm to the surface of the coating equipment to clean the deposits. Collect the jet debris mixture and add water to completely dissolve the sodium bicarbonate debris, then filter and recover the sediment powder material. SEM and energy spectrum detection found that the silicon nitride on the surface of the coating equipment was completely removed after cleaning ( Figure 4 ,table 3). The N content decreased from 56.79% to 0.00%, the Si content decreased from 40.59% to 0.12%, and the Al content increased from 2.56% to 99.83%.
[0042] Table 3 Comparison of element content on the surface of the alu...
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