Vacuum laser device and method for instantaneous local heating and in-situ characterization of perovskite surface

A laser device and local heating technology, applied in laser welding equipment, metal processing equipment, sustainable manufacturing/processing, etc., can solve problems such as high cost, slow speed, and difficult to meet, to ensure quality and accuracy, reduce Difficulty in operation and convenient in-situ monitoring

Pending Publication Date: 2022-05-27
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in practice, the above methods cannot meet all experimental conditions. For example, the annealing method is difficult to accurately select the heating area and can only be adjusted as a whole; the laser irradiation method usually requires the assistance of a mask or photoresist, etch The combination of agent and precursor liquid cannot be used in experiments or processes that have certain requirements on the surface quality of materials.
Other pattern writing processes such as ion beam and electron beam etching, the former will implant ions to cause material defects to contaminate the intrinsic properties, while the latter will also pollute the surface of the material due to the use of resist, and the etching time is long, slow and expensive
Even if the combination of different equipment is used, it is still time-consuming and labor-intensive, and the cost is high, making it difficult to meet all actual situations.

Method used

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  • Vacuum laser device and method for instantaneous local heating and in-situ characterization of perovskite surface
  • Vacuum laser device and method for instantaneous local heating and in-situ characterization of perovskite surface
  • Vacuum laser device and method for instantaneous local heating and in-situ characterization of perovskite surface

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] The parameters of the laser device were set as the wavelength of 1064 nm, the power of 30 W, and the scanning speed of 1 m / s. The regulated perovskite material is a strontium titanate single crystal with a size of 10*10*0.5 mm. First, the calibration sample is placed on the sample stage, and the aluminum wire is punched between the sample and the sample stage electrode by ultrasonic pressure welding technology. Then clamp the sample stage on the fixed rod, fix the fixed rod with the electrode plate, and calibrate the level. Use wires to connect the stage electrodes to the detachable electrode rods. The above steps are all carried out outside the vacuum box, then the electrode plate is connected and sealed with the vacuum box, the vacuum pump is turned on, and the vacuum gauge shows that the air pressure in the chamber is 3.3×10 -7 Torr, you can use the quartz observation window to observe the sample condition in the cavity.

[0067] Place the vacuum box under the lase...

Embodiment 2

[0070] The parameter setting and experimental operation steps of the laser device are roughly the same as those in Example 1, the difference is that there are two aluminum wire loops on the sample to compare the transport changes in the laser scanning and non-scanning regions.

[0071] The control material is the strontium titanate superlattice Ruddlesden-Popper (RP) phase epitaxially grown on the strontium titanate substrate. Due to the existence of the superlattice phase interface, the RP phase is more difficult to generate oxygen vacancies than the single crystal phase. It is easier to fill when the oxygen vacancies are filled. Using this feature, the RP phase on the surface can be filled first to block the channel and then retain the bulk oxygen vacancies in the lower layer, so that the conductivity can be retained, and the first half of the transport curve The section is the same as in Example 1. After the laser is turned off, the resistance of the material rises slowly bu...

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Abstract

The invention provides a perovskite surface instantaneous local heating and in-situ characterization vacuum laser device and method, and the device comprises a laser device, and also comprises a vacuum box, a flange through pipe of the vacuum box is provided with a quartz observation window, and is also provided with an electrode plate which is connected with an external module; the sample bearing structure comprises a fixing rod, one end of the fixing rod is connected with the flange through pipe, the other end of the fixing rod is connected with a sample table, and a sample placing area is arranged on the upper surface of the sample table and located in the observation range of the quartz observation window. The device is simple and reasonable in design structure, small in size, high in adaptability, convenient to operate and high in vacuum degree. The instantaneity of surface heating and the locality and the rewritability of a high-temperature area are realized by using external scanning laser, and meanwhile, the real-time in-situ characterization of the material property change under the vacuum condition is realized. During use, assistance of a photoresist, an etching agent, a precursor solution and the like is not needed, so that the experimental process operation is greatly simplified, the cost is reduced, and pollution and introduction of defects are avoided.

Description

technical field [0001] The invention relates to the technical field of thin film production, in particular to a vacuum laser device and method for instantaneous local heating of perovskite surfaces and in-situ characterization. Background technique [0002] Perovskite oxide materials are valued in the field of microelectronic functional devices due to their richness, variability, and strong electronic correlation. The theory of solid state physics shows that when the thickness of such materials is reduced to tens or even a few nanometers, the films will exhibit properties that are quite different from those of the bulk due to boundary effects and quantum effects. Compared with the bulk thin film structure, it is easier to be regulated by external factors, so the regulation of thin film materials gradually replaces the bulk phase as the focus of research, and the electrical transport property is one of the important properties of the material. [0003] Oxygen vacancy conduct...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/00B23K26/03B23K26/70C04B41/80
CPCB23K26/0006B23K26/03B23K26/702C04B41/0036C04B41/0072C04B41/009C04B41/80C04B35/01Y02P70/50
Inventor 聂越峰虞阳
Owner NANJING UNIV
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