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Thin film type cathode and grid as well as its preparation method

A film-type, cathode-grid technology, applied in cold cathode manufacturing, electrode system manufacturing, discharge tube cold cathode, etc., can solve the problems of high cost, environmental pollution, low efficiency, etc., and achieve high yield, low material cost, and manufacturing The effect of simple process

Inactive Publication Date: 2003-10-08
厦门火炬福大显示技术有限公司 +1
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Problems solved by technology

Moreover, the formation process of the strip electrodes usually uses complex semiconductor processes such as photolithography, including multiple processes such as plate making-glue removal-exposure-hardening-film development-corrosion-film removal, etc., which requires the use of glue removal machines and exposure machines , cleaning, drying, darkroom and other equipment and conditions, resulting in many process links, difficult control, large investment, high cost, low efficiency and polluting the environment

Method used

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  • Thin film type cathode and grid as well as its preparation method
  • Thin film type cathode and grid as well as its preparation method

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Embodiment Construction

[0027] Such as Figure 1 and Figure 2 As shown, the formation process of the metal lower electrode of the cathode grid of the present invention includes: the glass substrate 1 adopts ordinary soda-lime silicate series flat glass, and the glass substrate 1 is annealed and cleaned before film deposition to obtain a clean coating surface; First sputter a chromium (titanium) film on the glass substrate 1 with direct current sputtering as a bottom film, and use direct current sputtering to sputter a copper film on the chromium (titanium) film to form a chromium (titanium)-copper double-layer composite film, which is fully Utilize the characteristics of strong adhesion between chromium (titanium) film and glass substrate and strong conductivity of copper film; use screen printing to print anti-etching protective ink on chromium (titanium)-copper double-layer composite film; and then chemical corrosion treatment Corrosion removes the chromium (titanium)-copper metal film without in...

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Abstract

A thin film type cathode and grid includes the glass base plate, the metal lower electrode, the insulation layer and the metal upper electrode. The metal lower electrode adopts the composite electrode containing two layers of metal thin films, with the metal possessing high adhesivity to glass in lower and the metal possessing high conductivity in upper. The insulation layer adopts amorphous state oxide dielectric layer. Composite electrodes of chrome (titanium-copper two layers are utilized in the metal lower electrode and the metal upper electrode. The thin film type cathode and grid with sandwich intersection among the insulation layer electrode, the metal lower electrode and the metal upper electrode as well as isolation in middle is formed by using methods of screen printing and chemical treatment.

Description

technical field [0001] The invention belongs to the technical field of display device manufacture, and in particular relates to a thin-film cathode grid that can be used in a field emission flat panel display device and a preparation method thereof. technical background [0002] At present, the cathodes used for field emission flat panel displays mainly include metal microtip type, namely Spindt type; silicon cone type; diamond-like film type; metal-insulator-metal type, namely MIM type; carbon nanotube type; surface conduction type and other structures. Compared with the pointed cone structure, the MIM structure has low driving voltage and does not require a resistive layer to stabilize the emission current; the emitted electrons are basically perpendicular to the emission surface, with self-focusing characteristics, and the distance between the cathode and the anode is relatively large, so CRT can be used With the advantages of high-voltage phosphors, it is considered to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J1/30H01J9/02
Inventor 郭太良叶光
Owner 厦门火炬福大显示技术有限公司
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