Transparent laminate having low emissivity

A low-radiation, multi-layer body technology, applied in coating, layered products, sputtering coating, etc., can solve problems such as unstable pressure, uneven film quality, unstable spraying rate, etc., to improve durability and wear resistance, crystallization inhibition effect

Inactive Publication Date: 2004-02-18
CARDINAL CG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In the invention proposed in the aforementioned Japanese Patent Laid-Open No. 9-71441, three methods are listed as methods for reducing the grain size of the metal oxide layer. 1) A method of using a Zn target and increasing the pressure of the sputtering gas ; 2) adopt Zn target, the method for mixing nitrogen in the oxygen as sputtering gas; 3) adopt the ZnO target that is coated with Al, use the method for the argon sputtering of adding several percentage points of oxygen, but there is this class problem: In the above method 1), due to the high pressure of the spraying gas, the press

Method used

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  • Transparent laminate having low emissivity
  • Transparent laminate having low emissivity
  • Transparent laminate having low emissivity

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0049] (Example 1)

[0050] use Picture 11 The shown is a load-locked linear magnetron spraying device with 5 sets of cathodes, figure 1 The structure shown, namely glass / ZnO / Ag / ZnO / SiN x / ZnO / SiN x The low-emissivity transparent multilayer body composed of a dielectric / silver / dielectric sandwich structure is formed into a film on one side of a general float glass with a thickness of 3mm×2500mm×1800mm.

[0051] From Picture 11 The entrance of the spraying device shown transports the cleaned plate glass (G) to the load lock chamber (1), evacuates to a predetermined pressure, and transports it to the coating chamber (2), and then introduces the spraying gas In the plating chamber (2), it is adjusted to a predetermined pressure balanced with the exhaust pump, and then the cathode (3) is energized to generate discharge, and the material set on each cathode is sprayed to form a film.

[0052] In addition, in this embodiment, the glass is not particularly heated during plating but is...

Example Embodiment

[0059] (Example 2)

[0060] Using the same sputtering device as in Example 1, and image 3 Same structure, namely glass / ZnO / Ag / TiO x / ZnO / SiN x / ZnO / Ag / TiO x / ZnO / SiN x The low-emissivity transparent multilayer body composed of the dielectric / silver / dielectric / silver / dielectric sandwich structure is formed as a film on one surface of the same float glass in the following manner.

[0061] First, oxygen is introduced into the chamber to make the pressure 0.40Pa, and 55kW of direct current is applied to the cathode (3b) with a zinc target (size: 3100mm×330mm) to generate reactive spraying, and the glass is moved back and forth under the cathode. , Forming a zinc oxide film as the first layer.

[0062] Then, the gas in the chamber was switched to argon, the pressure was set to 0.45 Pa, a direct current of 8 kW was applied to the cathode (3c) with a silver target (size: 3100mm×330mm), and a titanium target (size: 3100mm) The cathode (3d) of ×330 mm) was supplied with a direct current o...

Example Embodiment

[0066] (Example 3)

[0067] Using the same sputtering device as in Example 1, and Figure 5 Same structure, namely glass / ZnO / Ag / TiO x / ZnO / SiN x / ZnO / SiN x / ZnO / Ag / TiO x / ZnO / SiN x The low-emissivity transparent multilayer body composed of the dielectric / silver / dielectric / silver / dielectric sandwich structure is formed as a film on one surface of the same float glass as follows.

[0068] Using the same method as in Example 2, the first layer of zinc oxide film, the second layer of silver film, the third layer of titanium film (after acting as a sacrificial layer, become a titanium oxide film), and the fourth layer of A zinc oxide film, a fifth layer of aluminum-added silicon nitride film, and a sixth layer of zinc oxide film.

[0069] Next, use the same method as the fifth and sixth layers to form the seventh layer of aluminum-added silicon nitride film and the eighth layer of zinc oxide film, and then use the second layer, third layer, and fourth layer. , The fifth layer is the sam...

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Abstract

A transparent laminate having low emissivity which has one or more dielectric layers such as a zinc oxide (ZnO) film and one or more metal layers such as a silver (Ag) film being laminated on one another, characterized in that at least one dielectric layer is divided in the direction of film thickness by at least one amorphous layer. The transparent laminate having low emissivity exhibits improved durability of the metal layer, since the formation of a zinc oxide film as a dielectric layer on an amorphous layer causes the collapse of the columnar crystal structure of zinc oxide and, as a result, not only the amorphous layer but also the dielectric layer act also as a barrier preventing the entry of moisture or a gas.

Description

technical field [0001] The present invention relates to a low emissivity transparent multilayer body used as multilayer glass, laminated glass, transparent plate with electromagnetic wave control function, flat heating element and transparent electrode. Background technique [0002] It is known that these are disclosed in JP-A-63-30212, JP-A-63-134232 or JP-A-63-239044, etc., as low-emissivity transparent materials for realizing sun-shielding and high-insulation mechanisms. Multi-layer body. [0003] This low-emissivity transparent multilayer body is formed by laminating a total of (2n+1) dielectric layers and metal layers on a transparent substrate, and a protective layer is formed on the uppermost layer. Zinc oxide is known to have an excellent film-forming speed as a dielectric layer, and silver is known to have an excellent radiation reflection function as a metal layer. [0004] In addition, it is known that SiN x 、TiO 2 or SiAlO x N y (silicon aluminum oxynitride...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B17/10C03C17/36
CPCC03C17/366C03C17/36C03C2217/281C03C17/3652C03C17/3681C03C2217/216B32B17/10174C03C17/3639C03C17/3618C03C17/3644C03C2217/78C03C17/3626Y10T428/265B32B9/00
Inventor 村田健治堂下和宏中井日出海
Owner CARDINAL CG
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