Unlock instant, AI-driven research and patent intelligence for your innovation.

Preparing process of graphite target containing dopant element

A dopant and graphite target technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of high equipment requirements, graphite target cannot meet the content requirements, and is easy to crack.

Inactive Publication Date: 2007-06-27
HARBIN INST OF TECH
View PDF0 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the graphite target prepared by the traditional high-temperature sintering method is prone to produce a large number of macroscopic particles, which seriously reduces the quality of the film produced when it is used as a cathodic arc source. The graphite target containing dopant elements prepared by the sintering method The content requirements of the design cannot be met, the plasma beam intensity generated by the high-pressure molded graphite target of Cambridge University is weak, the cladding efficiency is low, and it is easy to crack, and the ultra-high pressure molded graphite target of Singapore Nafon Company has a porous structure and high equipment conditions. And provide a kind of preparation method of the graphite target material containing dopant element

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparing process of graphite target containing dopant element
  • Preparing process of graphite target containing dopant element
  • Preparing process of graphite target containing dopant element

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0006] Specific Embodiment 1: This embodiment is described in conjunction with FIG. 1 and FIG. 2. The graphite target material containing dopant elements is prepared according to the following steps: (1) Accurately weigh the purity according to the design requirements of the graphite target material containing dopant elements. Add 99.999% graphite powder with a particle size of ≤1 μm and dopant element powder with a particle size of ≤1 μm into a planetary ball mill, and use industrial alcohol as a solvent, ball mill and mix for 2±0.5h under the condition of 300-400r / min; (2) Vacuum dry the mixed powder; (3) Put the plastic rubber sleeve 2 in the steel cylinder 1, the diameter of the plastic rubber sleeve 2 is 1-2 cm smaller than the inner diameter of the steel cylinder 1, and pull out the plastic rubber sleeve 2 and the steel cylinder 1. The air between the inner walls of the cylinder 1 makes the plastic rubber sleeve 2 closely adhere to the inner wall of the steel cylinder 1; ...

specific Embodiment approach 2

[0009] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the dopant element powder in step (1) is boron, silicon, iron, aluminum, gold or zinc powder. Other steps are the same as those in Embodiment 1.

[0010] Elements that exist in solid form and have a melting point above 800° C., except those that are radiative, toxic or volatile, can be used as dopant elements in this embodiment.

specific Embodiment approach 3

[0011] Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that the dopant element powder in step (1) is iron powder. Other steps are the same as those in Embodiment 1 or 2.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle diameteraaaaaaaaaa
densityaaaaaaaaaa
diameteraaaaaaaaaa
Login to View More

Abstract

The preparation process of graphite target containing dopant element includes the following steps: ball milling mixture of graphite powder and dopant element, vacuum drying, vacuumizing the gap between plastic-rubber jacket and steel cylinder, filling mixture powder, pre-pressing and cold isostatic cold pressing, releasing pressure, sintering and cooling. Thus prepared graphite target containing dopant element has density of 2.06 g / cu cm, low amount of inside residual gas, arc spot diameter as small as 1-5 microns, resistivity not higher than 7.8x10<-5> Ohm.cm and stable arc discharge current.

Description

technical field [0001] The invention relates to a preparation method of a graphite target. Background technique [0002] Due to its high temperature resistance, corrosion resistance and self-lubricating properties, graphite materials have been widely used in nuclear reactors, aviation and aerospace structural materials, electrode materials, drill bits for special purposes, corrosion-resistant crucibles for chemical experiments, semiconductor materials and other fields. Especially in the field of diamond or diamond-like film deposition, graphite materials are often used as a cathode target source. The purity of graphite cathode targets is high, and the purity of graphite in the target is generally above 99.99%. The traditional method of preparing graphite targets cannot achieve solid-phase doping, but bonds graphite powder with a binder material (such as pitch), and then heat-moldes it at high temperature (above 2000°C) to harden it; this traditional method The prepared grap...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C01B31/02
Inventor 韩杰才檀满林朱嘉琦陈旺寿
Owner HARBIN INST OF TECH