Carbon film laminate, method of manufacturing said laminate, and lubricant using said laminate

Abstract

An object of the invention is to provide a carbon film laminate having a sliding surface with low friction, low abrasion, and low counterpart aggressiveness using high adhesiveness to a base material, hardness, surface flatness, low counterpart aggressiveness, transparency, and high thermal conductivity which are provided to the carbon film without using liquid and semiliquid lubricants such as lubricating oil. Provided is a carbon film laminate including a base material, a carbon film adhesion reinforcing layer which is provided on the base material and which is formed from silicon oxide (SiOx, x=1 to 2) containing fluorine atoms (F) in a concentration of 1×1019 atoms / cm3 or more, and a carbon film that is formed on the carbon film adhesion reinforcing layer. The carbon film contains fluorine atoms in the film in a concentration of 1×1019 to 1×1021 atoms / cm3, and has an approximate spectrum curve obtained by superimposing, on a peak fitting curve A at a Bragg angle (2θ±0.5°) of 43.9° in an X-ray diffraction spectrum by CuKα1 rays, a peak fitting curve B at 41.7° and a baseline.

Description

TECHNICAL FIELD[0001]The present invention relates to a carbon film laminate, a method of manufacturing the carbon film laminate, and a lubricant using the carbon film laminate.BACKGROUND ART[0002]As examplified by engine oil of a vehicle, a liquid lubricant, particularly, oils in which have high viscosity and have a strong film, are generally used for the lubrication of sliding components.[0003]However, such oil-based liquid lubricants, generally, cannot be used in food processing machines, components for business machine, aerospace machines, semiconductor-related manufacturing devices, special environments such as a high temperature environment, a vacuum environment, a clean environment, and an ultra-clean environment, ultra-small machines, and the like. Therefore, a lubricant capable of being used in these cases, or countermeasures for providing self-lubricating properties to a sliding and frictional unit surface is in demand. In addition, detriment to the environment due to disp...

AI Technical Summary

Benefits of technology

[0051]The laminate of the invention has high adhesiveness to the base material, hardness, surface flatness, transparency, thermal conductivity, low friction coefficient, a low wear rate, and low counterpart aggressiveness which are provided to the carbon film. Accordingly, when using the laminate of the invention, a laminate having a low-friction and low-abrasion frictional surface may be provided without using lubricating oil, a solid lubricant, and the like. According to the method of depositing the carbon film of the invention, friction and abrasion characteristics of a surface of the base material may be improved, as well as a non-colored and high-heat-dissipation sliding surface may be provided due to transparency and thermal conductivity of the carbon film.

Problems solved by technology

However, such oil-based liquid lubricants, generally, cannot be used in food processing machines, components for business machine, aerospace machines, semiconductor-related manufacturing devices, special environments such as a high temperature environment, a vacuum environment, a clean environment, and an ultra-clean environment, ultra-small machines, and the like.

In addition, detriment to the environment due to disposal of deteriorated oil becomes problematic when using oil as a liquid for lubrication.

Among these, the molybdenum disulfide and the tungsten disulfide which are frequently used are environmentally detrimental sulfur compounds, and there is a problem in that a load is applied to the environment during disposal and thus a disposal treatment is necessary.

A producing district of the rare metal is extremely localized, a supply amount thereof is limited, and it is difficult to obtain the rare metal due to a recent increase in demand.

In addition, a country that produces the rare metal is extremely rare, and thus it is expected that it is more difficult to obtain the rare metal in the future due to policies, economic situations, unstable political situations, and the like.

However, the solid lubricant itself or the film material is a soft material and is damaged due to friction.

Therefore, a long operational lifespan is a major issue.

In addition, generally, a spraying method has been spreading widely for application of the dry film, but application efficiency is as low as approximately 15%, and a large environmental load is problematic.

In addition, in the dry film, since the solid lubricant itself is colored and is opaque, or in a case of containing a binder, the solid lubricant is colored and is opaque due to the binder, there is a problem in that a base material onto which the dry film is applied is colored.

However, there is a problem in that the DLC film is opaque, and the base material on which the film is formed is colored.

In addition, thermal conductivity is as low as 0.2 to 30 W / mK, and thus in a case where heat dissipation is important for suppression of abrasion, there is a problem in the DLC film.

In addition, the DLC film is a hard material, and thus in a case where a sliding counterpart is a soft material, there is a problem in that the DLC film abrades the counterpart (counterpart aggressiveness).

Generally, the hard material is lacking affinity, and thus it is difficult to transition from initial (strict) abrasion to slight (mild) abrasion.

Generally, the DLC film is weak against a high temperature, and thus there is also a problem in that the DLC film cannot be used at 200 to 300° C. or higher.

Therefore, it is difficult or impossible to use the CVD diamond in an application other than a flat plane.

However, a high temperature of 800 to 400° C. is necessary to obtain the diamond film in any case, and thus there is a problem in that a base material on which a film is formed is restricted.

In addition, a film is formed at a high temperature, and thus there is also a problem in that the diamond film that is formed has a tendency to be peeled off due to an internal stress that remains inside the film.

In addition, there is a problem in that direct coating is very difficult with respect to an iron-based base material that is particularly important in practical use.

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