The utility model discloses a three-section water-cooling
heat shield with grooves inside, which relates to the technical field of
monocrystalline silicon production and comprises a water-cooling conical cylinder, the water-cooling conical cylinder is composed of an upper-section conical cylinder, a middle-section conical cylinder, a lower-section conical cylinder and criss-cross grooves arranged on the inner wall, the upper-section conical cylinder, the middle-section conical cylinder and the lower-section conical cylinder are communicated with one another, and the upper-section conical cylinder, the middle-section conical cylinder and the lower-section conical cylinder are communicated with one another. The upper-section conical cylinder, the middle-section conical cylinder and the lower-section conical cylinder are obliquely arranged, one side of the upper portion of the water-cooling conical cylinder is fixedly connected with a first
water pipe, the other side of the upper portion of the water-cooling conical cylinder is fixedly connected with a second
water pipe, a water inlet is formed in the end of the first
water pipe, and a water outlet is formed in the end of the second water
pipe. A water outlet is formed in the end of the second water
pipe. Through the arrangement of the upper-section conical cylinder, the middle-section conical cylinder, the lower-section conical cylinder and the groove, the distance between a
crystal bar and a
water cooling screen is closer, the heat
absorption effect is better, the
crystal pulling speed of the
single crystal furnace is increased, and the
crystal pulling quality is improved.