Processing method of differential type high-precision accelerometer
An accelerometer and processing method technology, applied in the direction of velocity/acceleration/shock measurement, acceleration measurement, metal processing equipment, etc. Reduce the effect of stress, reduce the effect of process temperature
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[0033] In order to make the above objectives, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0034] Such as Figure 1~3B It is a structural diagram of a micromechanical differential capacitance accelerometer with a symmetrical structure, and a method for preparing the movable silicon structure component (beam-mass structure) of the accelerometer of the present invention. figure 1 Shown is the structure diagram of the accelerometer (glass electrode cover solution) of the present invention. Such as figure 1 As shown, the accelerometer 100 has a glass upper electrode cover plate 100Ga, a glass lower electrode cover plate 100Gb, and a movable silicon structure component 100S.
[0035] figure 2 Shown is the structure diagram of the movable silicon structure component 100S, where 8a, 8b, 8c, 8d are elastic support beams...
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