Method for growing p-type ZnO crystal thin film by Li-F codoping
A co-doping, p-type technology, applied in the growth field of p-type ZnO crystal thin film, to achieve the effect of good electrical properties
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Embodiment 1
[0021] 1) get the zinc oxide, zinc fluoride and lithium carbonate powder that purity is respectively 99.99%, Li molar content is 0.6%, F molar content is 0.3%, ZnO, ZnF 2 and Li 2 CO 3 The mixed powder is poured into an agate ball cup, placed on a ball mill for ball milling, and the time of ball milling is 24 hours. There are two purposes of ball milling: the first is to make ZnO, ZnF 2 and Li 2 CO 3 Mix the powder evenly to ensure the uniformity of the prepared target; secondly, to mix ZnO, ZnF 2 and Li 2 CO 3 The powder is refined to facilitate the subsequent molding and sintering of the mixed powder.
[0022] After ball milling, the powder was pressed into discs with a thickness of 3 mm and a diameter of 50 mm. Pre-fired at 600°C for 1 hour, and then sintered at 1060°C for 3 hours to obtain the target.
[0023] 2) Using glass as the substrate, clean the substrate surface and put it into the growth chamber of the pulsed laser deposition device. The vacuum degree of ...
Embodiment 2
[0026] 1) get the zinc oxide, zinc fluoride and lithium carbonate powder that purity is respectively 99.99%, the Li molar content is 0.9%, the F molar content is 0.3%, ZnO, ZnF 2 and Li 2 CO 3 The mixed powder is poured into an agate ball cup, placed on a ball mill for ball milling, and the time of ball milling is 24 hours. There are two purposes of ball milling: the first is to make ZnO, ZnF 2 and Li 2 CO 3 Mix the powder evenly to ensure the uniformity of the prepared target; secondly, to mix ZnO, ZnF 2 and Li 2 CO 3 The powder is refined to facilitate the subsequent molding and sintering of the mixed powder.
[0027] After ball milling, the powder was pressed into discs with a thickness of 3 mm and a diameter of 50 mm. Then sintered at 800°C for 3 hours to obtain ZnF-doped 2 and Li 2 O ZnO ceramic target.
[0028] 2) Using glass as the substrate, clean the substrate surface and put it into the growth chamber of the pulsed laser deposition device. The vacuum degre...
Embodiment 3
[0031] 1) get the zinc oxide, zinc fluoride and lithium carbonate powder that purity is respectively 99.99%, Li molar content is 0.6%, F molar content is 0.3%, ZnO, ZnF 2 and Li 2 CO 3 The mixed powder is poured into an agate ball cup, placed on a ball mill for ball milling, and the time of ball milling is 24 hours. There are two purposes of ball milling: firstly, in order to make ZnO, ZnF 2 and Li 2 CO 3 Mix the powder evenly to ensure the uniformity of the prepared target; secondly, to mix ZnO, ZnF 2 and Li 2 CO 3The powder is refined to facilitate the subsequent molding and sintering of the mixed powder.
[0032] After ball milling, the powder was pressed into discs with a thickness of 3 mm and a diameter of 50 mm. Pre-fired at 600°C for 1 hour, and then sintered at 1060°C for 3 hours to obtain the target.
[0033] 2) Using quartz as the substrate, clean the surface of the substrate and put it into the growth chamber of the pulsed laser deposition device. The vacuu...
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