Phthalocyanine rare earth organic infrared semiconductor light guide detector
A detector and semiconductor technology, applied in the field of optoelectronics, can solve the problems of few types of organic infrared semiconductors, low carrier mobility, high resistivity of photosensitive materials, etc., achieving considerable market prospects, controllable electrical parameters, and outstanding novelty Effect
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[0025] like image 3 As shown, the phthalocyanine rare earth organic infrared semiconductor detector with electrical controllability of the present invention includes: a substrate 1, and a metal or transparent conductive electrode 3 is prepared on the substrate by magnetron sputtering or electron beam evaporation method, Through the implementation of photolithography process, the electrode structure is made into interdigitated, serpentine, ring, strip, and spiral electrodes 2, and then the rare earth phthalocyanine is deposited on the electrode structure by solution casting, spin coating, printing or thermal evaporation Photosensitive layer 2; or on the substrate 1, deposit a rare earth phthalocyanine thin film by solution or thermal evaporation, then use a mask to cover the rare earth phthalocyanine thin film, and use thermal evaporation, electron beam evaporation or magnetron sputtering on the phthalocyanine Electrodes are deposited on rare earth films.
[0026] The materia...
Embodiment
[0037] A 30 nm Cr film and a 5 μm thick Au film were deposited on a quartz substrate by magnetron sputtering; a 2–3 μm thick photoresist was spin-coated on the Au film, and baked at 80°C for 5 minutes before drying under ultraviolet light. Exposure; form a certain strip pattern of the photoresist in the developer; bake the film at 80°C for 5 minutes to harden the film; use plasma etching or stripping technology to form the metal electrode into a strip pattern with a spacing of 3 μm; remove the photoresist , to obtain a metal electrode with a strip pattern on a quartz substrate; dissolve gadolinium phthalocyanine and iodine (mass ratio 95:5) in chloroform; drop the iodine-doped gadolinium phthalocyanine solution onto the metal strip electrode with a dropper, and wait until After the chloroform evaporates, the iodine-doped gadolinium phthalocyanine forms a film between the metal strip electrodes to form a device.
[0038] Example: 3
[0039] A 1 μm erbium phthalocyanine thin fi...
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