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Multi-arc ion plating superlattice nanometer composite coating and preparation method of multi-arc ion plating superlattice nanometer composite coating

A nano-composite coating, multi-arc ion plating technology, applied in ion implantation plating, coating, metal material coating technology and other directions, can solve the problems of low film deposition efficiency, reduced mechanical properties, difficult to large-scale industrial production and other problems , to achieve the effect of improving the bonding strength, compensating for the decrease in hardness, high hardness and thermal stability

Active Publication Date: 2012-07-25
ANHUI DUOJINTUCENG TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the one hand, the current nano-multilayering of superhard films is mainly based on magnetron sputtering technology, but this technology for preparing thin films has low deposition efficiency and is difficult for large-scale industrial production; on the other hand, although vacuum annealing can reduce the internal stress, but as the temperature increases, especially when it exceeds 1000 °C, the mechanical properties decrease
[0006] In general, although there are many studies on titanium nitride-based coatings, there is no report on the precision mold of TiN-based nanocomposite coatings with ultra-high hardness, high thermal stability and good toughness obtained by multi-arc ion plating.

Method used

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  • Multi-arc ion plating superlattice nanometer composite coating and preparation method of multi-arc ion plating superlattice nanometer composite coating
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  • Multi-arc ion plating superlattice nanometer composite coating and preparation method of multi-arc ion plating superlattice nanometer composite coating

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Effect test

Embodiment 1

[0042] Such as figure 1 with figure 2 As shown, a kind of preparation method of multi-arc ion plating superlattice nanocomposite coating of the present embodiment comprises the following steps:

[0043] (1) The first intermediate frequency arc source 2 and the second intermediate frequency arc source 3 are respectively arranged on both sides of the vacuum chamber 1, N 2and Ar gas into the vacuum chamber 1, the target of the first intermediate frequency arc source 2 is made of Ti simple substance with a purity of 99.9%; the target of the second intermediate frequency arc source 3 is made of AlSi powder metallurgy, Al and Si The atomic percentage is 88:12, and the purity of the AlSi target is 99.9%;

[0044] (2) The workpiece after polishing is cleaned successively with acetone and alcohol ultrasonic waves for 15 minutes, and after drying, it is clamped on the fixture 4. The fixture 4 is arranged on the turntable 5, and the turntable 5 is located in the vacuum chamber 1. Vac...

Embodiment 2

[0056] The preparation method of the superlattice nanocomposite coating of the present embodiment, comprises the following steps:

[0057] (1) The first intermediate frequency arc source 2 and the second intermediate frequency arc source 3 are respectively arranged on both sides of the vacuum chamber 1, N 2 and Ar gas into the vacuum chamber 1, the target of the first intermediate frequency arc source 2 is made of Ti simple substance with a purity of 99.9%; the target of the second intermediate frequency arc source 3 is made of AlSi powder metallurgy, Al and Si The atomic percentage is 88:12, and the purity of the AlSi target is 99.9%;

[0058] (2) The workpiece after polishing is cleaned successively with acetone and alcohol ultrasonic waves for 15 minutes, and after drying, it is clamped on the fixture 4. The fixture 4 is arranged on the turntable 5, and the turntable 5 is located in the vacuum chamber 1. Vacuum to a vacuum of 7×10 -3 Pa, the heating temperature is 300°C, ...

Embodiment 3

[0066] The preparation method of the superlattice nanocomposite coating of the present embodiment, comprises the following steps:

[0067] (1) The first intermediate frequency arc source 2 and the second intermediate frequency arc source 3 are respectively arranged on both sides of the vacuum chamber 1, N 2 and Ar gas into the vacuum chamber 1, the target of the first intermediate frequency arc source 2 is made of Ti simple substance with a purity of 99.9%; the target of the second intermediate frequency arc source 3 is made of AlSi powder metallurgy, Al and Si The atomic percentage is 88:12, and the purity of the AlSi target is 99.9%;

[0068] (2) The workpiece after polishing is cleaned successively with acetone and alcohol ultrasonic waves for 15 minutes, and after drying, it is clamped on the fixture 4. The fixture 4 is arranged on the turntable 5, and the turntable 5 is located in the vacuum chamber 1. Vacuum to a vacuum of 7×10 -3 Pa, the heating temperature is 500°C, ...

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Abstract

The invention discloses a multi-arc ion plating superlattice nanometer composite coating and a preparation method of the multi-arc ion plating superlattice nanometer composite coating. A TiN layer in a cubic structure and an AlSiN layer in an orthohexagonal structure of the costing disclosed by the invention are alternately deposited on a nanometer transition layer, the nanometer transition layeris a Ti / TiN compound layer, and an AlSiN layer in the cubic structure is arranged on an interface of the AlSiN layer in the orthohexagonal structure. According to the preparation method, polished andcleaned workpieces are clamped on a clamp, the clamp is arranged on a turntable, the turntable is positioned in a vacuum chamber, Ar gas is introduced into the vacuum chamber, negative bias pressure is added for carrying out Ar ion bombardment cleaning on the surfaces of the workpeices, residues on the surfaces of the workpieces are removed, the negative bias pressure is reduced, a first medium frequency electric arc source is started, a Ti layer is generated through deposition, then, N2 gas is introduced, a TiN layer is generated through deposition, a second medium frequency electric arc source is started, N2 gas is introduced, the TiN layer in the cubic structure and the AlSiN layer in the orthohexagonal structure are alternately deposited and formed, and the coating is cooled to the room temperature in the vacuum chamber.

Description

technical field [0001] The invention relates to a surface coating strengthening treatment process for precision molds and high-speed cutting tools, in particular to a multi-arc ion-plating superlattice nano-composite coating and a preparation method thereof. Background technique [0002] Transition metal nitride coatings are widely used as mold surface modification materials because of their high hardness and good wear resistance. The resulting coating must have the following characteristics: good adhesion, sufficient thickness, appropriate mechanical properties (hardness and strength), thermal disturbance resistance and high temperature stability. Titanium nitride-based films have been widely used in molds and cutting tools due to their high hardness and good wear resistance. [0003] With the rapid development of the processing and manufacturing industry, higher and higher requirements are put forward for the mold, which also provides a huge impetus for its development. ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32
Inventor 张世宏蔡飞方炜李伟
Owner ANHUI DUOJINTUCENG TECH CO LTD
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