Method for preparing beryllium-copper alloy sheet by adopting continuous multi-arc ion plating physical vapour deposition
A technology of physical vapor deposition and multi-arc ion plating, applied in ion implantation plating, sputtering plating, vacuum evaporation plating, etc. Environmental and other issues, to achieve the effect of low manufacturing cost, simple and easy process, and high product yield
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Embodiment 1
[0025] Embodiment 1: a kind of method that adopts continuous multi-arc ion plating physical vapor deposition method to prepare beryllium-copper alloy thin plate, its steps are:
[0026] Step 1. Select a pure copper strip with a thickness of 0.1-0.25mm as the substrate, and do the following pretreatment:
[0027] (1) Wash with sodium carbonate lye at a concentration of 3-5% and a temperature of 60-80°C for 3-5 minutes to remove oil stains;
[0028] (2) Wash with dilute sulfuric acid at a concentration of 3 to 5% for 3 to 5 minutes to remove scale;
[0029] (3) Rinse with clean water;
[0030] (4) Ultrasonic cleaning with anhydrous ethanol, drying for later use;
[0031] Step 2. Select pure Be target or high beryllium content beryllium copper (50 ~ 80wt.%Be) alloy target:
[0032] preparation Pure Be or beryllium copper with high Be content (50-80wt.%Be) alloy target is used as a multi-arc ion plating target and is ready for use;
[0033] Step 3. Install the pure copper s...
Embodiment 2
[0046] Example 2 Multi-arc ion plating vapor deposition single-sided Be infiltration
[0047] Step 1: Select pure copper substrate
[0048] Select a 200mm × 200mm, 0.20mm thick pure copper strip as the substrate, first wash it with a sodium carbonate solution with a concentration of 5% and a temperature of 60°C for 5 minutes to remove oil stains; then wash it with a concentration of 4% dilute hydrochloric acid for 3 minutes to remove oxidation skin; then rinse with clean water; then ultrasonically clean with anhydrous ethanol, and dry for later use.
[0049] Step 2: Select pure Be target
[0050] select Pure Be target material, ready for use;
[0051] Step 3: Install the pure copper strip treated in step 1 on the substrate of a multi-arc ion coating machine as an anode; then put the pure Be target processed in step 2 into a multi-arc ion coating machine as a cathode;
[0052] Vacuum to 2×10 -3 After Pa, pass argon to stabilize the pressure in the multi-arc ion coating mach...
Embodiment 3
[0059] Example 3 Multi-arc ion plating vapor deposition single-sided Be infiltration
[0060] Step 1: Select pure copper substrate
[0061] Select a 200mm×200mm, 0.15mm thick pure copper strip as the substrate, first wash it with a sodium carbonate solution with a concentration of 5% and a temperature of 60°C for 5 minutes to remove oil stains; then wash it with dilute hydrochloric acid with a concentration of 4% for 3 minutes to remove oxidation skin; then rinse with clean water; then ultrasonically clean with anhydrous ethanol, and dry for later use.
[0062] Step 2: Select a beryllium copper alloy target with high Be content
[0063] casting Beryllium copper (Cu-80wt.%Be) alloy target with high Be content, ready for use;
[0064] Step 3: Install the pure copper strip treated in step 1 on the substrate of the multi-arc ion coating machine as the anode; then put the beryllium copper alloy target treated in step 2 into the multi-arc ion coating machine as the cathode ;
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