Method for preparing p-type ZnO nanowire
A p-type, nanotechnology, applied in the direction of nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the problems affecting the performance of devices, the quality of nano zinc oxide crystals is not high, etc., to achieve good repeatability, crystal Good quality, simple operation effect
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[0007] Example one:
[0008] 1. Deposit a ZnO film as a seed layer on a cleaned silicon substrate by ALD method. The substrate temperature of the reaction chamber is 170℃, the pulse time (pulse) of the precursor source diethylzinc and water is 0.02s, the nitrogen flushing time (waiting) is 0.5s, and the cycle period is 1000 times; 2. Water heat on it Method to grow ZnO nanorods. Prepare 200ml of a mixed aqueous solution of zinc acetate and hexamethylenetetramine with a concentration of 0.01M, place the aqueous solution and the above-mentioned sinking bottom in the reactor, the amount of solution is two-thirds of the capacity of the reactor, and place the reactor in a blast Keep it in a drying oven at 90°C for 24h; 3. Take out the above sample and rinse it with deionized water for 10s, then place it in the air and dry it naturally and then perform annealing at 400°C for half an hour to remove excess salt and other impurities on the surface of the nanorods; , Use the ALD method t...
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