A method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target

A technology of molybdenum-titanium alloy and large size, which is applied in the preparation of high-uniformity molybdenum-titanium alloy target material, high density, and large size field, which can solve the problems of target surface composition segregation, sputtering deposition layer performance degradation, deformation, etc. Achieve the effect of improving density uniformity, uniform microstructure and improving target quality

Active Publication Date: 2016-04-06
ADVANCED TECHNOLOGY & MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is that the connection between the adjacent target plates of the large-size target material in the prior art is not firm, the mechanical and machining performance is poor, and the density difference between the adjacent target plate and the target plate body is relatively large, which is easy Causes composition segregation and serious deformation problems after sintering, which easily leads to a decrease in the performance of the sputtered deposition layer; moreover, after filling molybdenum powder and titanium powder blended powder between adjacent target plates or blanks, hot isostatic pressing is carried out , it is easy to cause segregation of the surface composition of the target; and then a method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target with firm connection between adjacent blanks, uniform target overall density, and surface composition segregation is not easy

Method used

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  • A method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target
  • A method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target
  • A method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target

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Effect test

Embodiment 1

[0032] The method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target described in this embodiment includes the following steps,

[0033] (1) Select Mo powder with a purity of 99.96wt% and a Fischer particle size of 3 μm and titanium powder with a purity of 99.9wt% and a particle size of -325 mesh as raw materials; weigh a certain amount of Mo powder and Ti powder, add the polyethylene glycol that is equivalent to Mo powder and Ti powder weight and 3% wherein, add ethanol simultaneously, the ethanol weight that adds accounts for 30% of slurry gross weight, forms a mixture, and this mixture adopts roller ball mill Grinding for 36 hours, the ball-to-material ratio is 2:1 to form a slurry;

[0034](2) Spray and granulate the slurry with a closed cycle spray dryer, the inlet temperature of the spray dryer is 300°C, and the nozzle speed of the spray dryer is 8000rpm to obtain Mo-Ti composite powder;

[0035] (3) The Mo-Ti composite powder is ...

Embodiment 2

[0038] The method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target described in this embodiment includes the following steps,

[0039] (1) Select Mo powder with a purity of 99.96wt% and a Fischer particle size of 3 μm and titanium powder with a purity of 99.9wt% and a particle size of -325 mesh as raw materials; weigh a certain amount of Mo powder and Ti powder, add the paraffin wax that is equivalent to Mo powder and Ti powder weight and 1% therein, add hexane simultaneously, the weight that adds hexane accounts for 60% of slurry gross weight, forms a mixture, and this mixture adopts roller type ball mill to grind After 36 hours, the grinding balls are Mo balls, and the ball-to-material ratio is 2:1 to form a slurry;

[0040] (2) Spray and granulate the slurry with a closed-cycle spray dryer, the inlet temperature of the spray dryer is 250°C, and the nozzle speed of the spray dryer is 12000rpm to obtain Mo-Ti composite powder filled w...

Embodiment 3

[0044] The method for preparing a high-density, large-size, high-uniformity molybdenum-titanium alloy target described in this embodiment includes the following steps,

[0045] (1) Select Mo powder with a purity of 99.96wt% and a Fischer particle size of 3 μm and titanium powder with a purity of 99.9wt% and a particle size of -325 mesh as raw materials; weigh a certain amount of Mo powder and Ti powder, add the polyethylene glycol that is equivalent to Mo powder and Ti powder weight and 2% wherein, add ethanol simultaneously, the weight that adds ethanol accounts for 50% of slurry gross weight, forms a mixture, and this mixture adopts roller type ball mill Grinding for 48 hours, the grinding balls are Mo balls, and the ball-to-material ratio is 2:1 to form a slurry;

[0046] (2) Spray and granulate the slurry with a closed-cycle spray dryer, the inlet temperature of the spray dryer is 280°C, and the nozzle speed of the spray dryer is 10000rpm to obtain Mo-Ti composite powder f...

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Abstract

The invention discloses a preparation method of a molybdenum titanium alloy material with high density, large size and high homogeneity. The method comprises the following steps: 1) adding a solvent and a binder to Mo powder and Ti powder and grinding into slurry; 2) atomizing and pelletizing the slurry by using a spraying machine, wherein the inlet temperature is 250-300 DEG C, and the rotating speed of a spray nozzle is 8000-12000rpm, so as to obtain Mo-Ti composite powder; pressing the composite powder into blanks with regular sizes; 3) loading a plurality of blanks into a sheath, filling the Mo-Ti composite powder of 50-250 microns into the adjacent blanks to form a uniform composite powder layer, wherein the thickness of the composite powder layer is 0.5-1mm, and the condition that a gap between the inner wall of the sheath at any side and the outer wall of the adjacent blank is smaller than or equal to 0.5mm is ensured; and 4) welding and degassing the sheath and then carrying out hot isostatic pressing treatment at 750-900 DEG C and 120-160MPa and removing the sheath, wherein the heat-preserving and pressure-maintaining time is 4-6 hours. The target material fabricated by the method can be used as a cathode material of a magnetron sputtering technique.

Description

technical field [0001] The invention relates to a method for preparing a molybdenum-titanium alloy target with high density, large size and high uniformity, and belongs to the technical field of alloy targets. Background technique [0002] The sputtering target is used as a cathode material in the sputtering deposition technology. When used, the cathode material is separated from the cathode in the form of molecules, atoms or ions under the impact of positively charged cations, and then re-deposits a film on the surface of the anode. The existing Flat panel displays are mostly fabricated using sputter deposition techniques. Molybdenum-titanium alloy target is a new type of wiring coating target for flat panel displays. With the rise of large-size flat panel displays, the demand for large-size molybdenum-titanium alloy targets is also increasing year by year. Due to the limitation of equipment size, the production of large-sized molybdenum-titanium alloy targets is often ach...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C14/00C22C27/04C22C1/04B22F1/00C23C14/34B22F3/14
Inventor 刘国辉颜君毅姚惠龙郭颖利熊宁王铁军刘文彬陈福鸽林同伟刘慧渊
Owner ADVANCED TECHNOLOGY & MATERIALS CO LTD
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