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Preparation method of BST(barium strontium titanate)/BMN (bismuth magnesium niobate)/BST multilayer composite film

A multi-layer composite, thin-film technology, applied in chemical instruments and methods, niobium compounds, titanium compounds, etc., can solve the problems of high cost, difficult to obtain, unstable chemical properties of raw materials, etc., to achieve comprehensive performance improvement, simple process, and reduced The effect of production costs

Inactive Publication Date: 2014-09-10
TIANJIN UNIV
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Problems solved by technology

[0005] The preparation methods of dielectric thin films mainly include radio frequency magnetron sputtering (RF-Magnetron sputtering), pulsed laser deposition (PLD), metal organic chemical vapor deposition (MOCVD) and sol-gel method (Sol-Gel); Compared with the thin film prepared by the sol-gel method, it has the advantages of good uniformity, easy control of the stoichiometric ratio, and simple equipment, and has been widely used in the preparation of dielectric thin films. Alcoholate or acetate and tetrabutyl titanate are used as raw materials, the cost is high, the chemical properties of raw materials are unstable and difficult to obtain

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  • Preparation method of BST(barium strontium titanate)/BMN (bismuth magnesium niobate)/BST multilayer composite film
  • Preparation method of BST(barium strontium titanate)/BMN (bismuth magnesium niobate)/BST multilayer composite film
  • Preparation method of BST(barium strontium titanate)/BMN (bismuth magnesium niobate)/BST multilayer composite film

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Embodiment Construction

[0037] The raw materials used in the present invention are all commercially available analytical pure raw materials, and the present invention will be further described through specific examples below.

[0038] The preparation method of the BST / BMN / BST multilayer composite film of the present invention has the following steps:

[0039] (1) Preparation of strontium barium titanate precursor sol

[0040] ①Prepare titanium-citric acid-ethylene glycol solution

[0041] (a) According to Ba 0.5 Sr 0.5 TiO 3 Weigh the titanium dioxide powder, put the titanium dioxide into hydrofluoric acid, and heat the water bath until all of it is dissolved;

[0042] (b) Adding ammonia water to the solution of step (a) to neutralize the reaction to generate metatitanic acid precipitation;

[0043] (c) Suction filtration and washing step (b) to precipitate the metatitanic acid obtained, then add metatitanic acid to nitric acid, magnetically stir until the precipitate is completely dissolved to obtain a titaniu...

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Abstract

The invention discloses a preparation method of a BST (barium strontium titanate) / BMN / BST multilayer composite film. A layer of BMN dielectric layer with low loss is additionally arranged between two BST films, so that the dielectric loss of the film can be reduced. The method is characterized by comprising the steps: first preparing precursor sol of BST and BMN, then respectively dropping the precursor sol onto a substrate to prepare a corresponding film, carrying out post-annealing on the film at the temperature of 550 to 750 DEG C to obtain the BST / BMN / BST multilayer composite film. The barium titanate, strontium titanate and titanium dioxide are used as raw materials to substitute partial alcohol salt and tetrabutyl titanate, so that the production cost of the film is reduced. The magnesium carbonate is used for substituting the magnesium nitrate hydrate, so that the chemical proportioning is more precise; by adopting a novel improved sol-gel process, the composite film is excellent in performance, simple in process and wide in application prospect.

Description

Technical field [0001] The invention belongs to the field of electronic information materials and components, and particularly relates to a BST / BMN / BST multilayer composite film for microwave tuning components and a preparation method thereof. Background technique [0002] In recent years, wireless communication has developed rapidly, and network systems have been diversified (such as mobile phone networks, personal area networks (PAN), and wireless local area networks (WLAN) coexistence), requiring reconfigurable smart devices to be compatible with various communication standards. Due to its high tunability, small size and low cost, dielectric tunable radio frequency capacitors have attracted wide attention as the basic unit of intelligent radio frequency applications in reconfigurable devices; their research has focused on dielectric tunable capacitor materials. [0003] Perovskite structure BST-based materials are currently the most widely studied type of dielectric tunable diel...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/00C01G23/00C01G33/00
Inventor 李玲霞董和磊于仕辉金雨馨许丹
Owner TIANJIN UNIV
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