ITO-Ag-ITO etching liquid for AM-OLED display screen and preparation method

An AM-OLED, etching solution technology, applied in chemical instruments and methods, surface etching compositions, etc., can solve the problem of difficulty in controlling the etching angle and the etching amount of the metal layer, affecting the image accuracy and quality of high-density thin wires, affecting etching Effect repeatability and other issues, to achieve the effect of stable reaction, smooth lines, and consistent etching rate
CN105176533AActive Publication Date: 2015-12-23JIANGYIN RUNMA ELECTRONICS MATERIAL

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
JIANGYIN RUNMA ELECTRONICS MATERIAL
Publication Date
2015-12-23
Patent Text Reader

Abstract

The invention discloses ITO-Ag-ITO etching liquid for an AM-OLED display screen and a preparation method. The etching liquid is prepared from phosphoric acid, acetic acid, nitric acid, additives, surfactants and pure water. The preparation method of the etching liquid comprises the steps that the rotating speed of a stirrer of a dosing tank is kept at normal temperature and pressure, the pure water, the phosphoric acid, the acetic acid, the nitric acid, the additives, the surfactants and the balance pure water are sequentially added into the dosing tank, and after full stirring is conducted, the ITO-Ag-ITO etching liquid is prepared by introducing a fully-stirred mixture into a filter for filtration. According to the ITO-Ag-ITO etching liquid for the AM-OLED display screen and the preparation method, the ITO-Ag-ITO etching liquid is small in particle size and high in purity, the etching rate to different metal is basically the same, and reaction is stable; the etching rate can be controlled by adjusting the concentrations of the phosphoric acid and the nitric acid, the surface of a substrate etched through the etching liquid is clean and tidy, residues do not exist, the intermetallic layering phenomenon does not exist, remaining lines are flat and smooth, and the etching angle is kept between 70 degrees to 90 degrees.
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Description

technical field

[0001] The invention relates to a composition for chemical etching of metal materials and a preparation method thereof, in particular to an ITO / Ag / ITO etchant for AM-OLED display screens and a preparation method thereof. Background technique

[0002] AM-OLED is the abbreviation of Active-matrix organic light emitting diode in English, and the full name in Chinese is active matrix organic light emitting diode or active matrix organic light emitting diode. The structure of the AM-OLED screen has three layers, AM-OLED screen + TouchScreenPanel (touch screen panel) + outer protective glass. AM-OLED is a kind of OLED technology. OLED means that it is a self-luminous display, which uses multiple layers of organic compounds to achieve independent R, G, and B three-color light. The AM-OLED screen is very thin, and the touch layer can be integrated in the screen, so it is more advantageous to make an ultra-thin machine. AM-OLED adopts pentile arrangement, unlike t...

Claims

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