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Preparation method for nanoporous silicon

A nanoporous, industrial silicon technology, applied in nanotechnology, nanotechnology, chemical instruments and methods, etc., can solve the problems of uneven porous silicon pores, cumbersome operation process, and high equipment requirements, and achieve uniform pore size and short process flow , the effect of low equipment requirements

Inactive Publication Date: 2016-03-16
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that the porous silicon prepared by this method not only has uneven pores, but also has low efficiency and poor repeatability.
(2) The photochemical etching method is mainly evolved from the chemical etching method, and the reaction is accelerated by laser, but the disadvantage of this method is poor repeatability and high cost
However, its equipment requirements are high, the process flow is long, and the operation process is cumbersome.

Method used

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  • Preparation method for nanoporous silicon
  • Preparation method for nanoporous silicon
  • Preparation method for nanoporous silicon

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Step 1. Weigh 6.6g of magnesium powder and 3g of industrial silicon powder, mix them evenly and put them in a quartz tube, then use a molecular pump to evacuate the quartz tube and seal it.

[0040] Step 2. Put the quartz tube into the vertical pulling furnace, raise the temperature to 700 °C at a rate of 5 °C / min, and keep it warm for 1 hour, then cool to room temperature with the furnace, open the quartz tube, and take out the Mg 2 Si-Mg alloy and grind it into powder.

[0041] Step 3, weigh 3g of Mg 2 Si-Mg alloy powder and 9g of ZnCl 2 , mixed evenly, placed in a corundum crucible, placed in a tube furnace, and fed with Ar gas, then heated to 300°C at a rate of 5°C / min, kept for 10h, and dealloyed.

[0042] Step 4. Soak the product of step 3 in 10% hydrochloric acid for 5 hours, then centrifuge at 8000r / min for 5 minutes, filter until the solution is neutral, and dry it in vacuum at 60°C in a drying oven.

Embodiment 2

[0044] The difference between this embodiment and Example 1 is that in step 1, 7.5g of magnesium powder and 3g of industrial silicon powder are weighed, and 15g of ZnCl in step 3 2 , others are the same as in Example 1.

Embodiment 3

[0046] The difference between this embodiment and Example 1 is that in step 3, 12g of AlCl is weighed 3 , others are the same as in Example 1.

[0047] figure 1 , figure 2 It is the nitrogen adsorption-desorption curve and pore size distribution diagram of the nanoporous silicon of the sample in Example 1.

[0048] image 3 , Figure 4 Be the XRD diffraction pattern of embodiment 3 samples.

[0049] Figure 6 It is the nanoporous silicon SEM scanning spectrum of the sample in Example 2.

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Abstract

The invention provides a method for preparing nanoporous silicon with industrial silica powder as a raw material. Silica powder and magnesium powder are subjected to alloying treatment, a precursor Mg2Si / Mg composite material is prepared, then dealloying treatment is carried out, finally the prepared product is subjected to acid pickling, centrifugation and drying, and nanoporous silicon is prepared. The method can raise the utilization rate of industrial silica powder, achieves resource utilization of silica powder, raises the additional value of silica powder, and has characteristics of wide raw material sources, low cost and simple technology operation. The prepared nanoporous silicon has characteristics of uniform pore size distribution, large specific surface area and the like, and has wide application prospects.

Description

technical field [0001] The invention belongs to the technical field of material preparation, and in particular relates to a method for preparing nanoporous silicon with industrial silicon powder as raw material. Nanoporous silicon is prepared by using raw materials such as industrial silicon powder, magnesium powder, metal chloride molten salt and hydrochloric acid. Material. Background technique [0002] Nanoporous silicon has the characteristics of high specific surface area, good permeability, low thermal conductivity, good adsorption, and high chemical activity, making it widely used in lighting materials, solar cells, fuel cells, light-emitting devices, sensors, medical materials, supercapacitors and biological Imaging and other aspects have a wide range of applications. There are mainly the following methods for the preparation of porous silicon: (1) chemical etching method, which is a method of immersing silicon in an etching solution based on HF acid for etching to ...

Claims

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Application Information

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IPC IPC(8): C01B33/021B82Y30/00
CPCC01B33/021C01P2002/72C01P2004/03C01P2004/64C01P2006/12C01P2006/14C01P2006/16C01P2006/17
Inventor 王增梅李亚飞陆文敏
Owner SOUTHEAST UNIV
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