Preparation method of piezoelectric ceramic with high Curie temperature and film thereof

A technology of piezoelectric ceramics and thin films, which is applied in the field of preparation of high Curie temperature piezoelectric ceramics and thin films, can solve the problems of performance repeatability of difficult products, and achieve the effects of dense and uniform microstructure, composition adjustment, and good performance repeatability

Inactive Publication Date: 2016-07-06
INST OF ACOUSTICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the problems that existing piezoelectric ceramic materials are difficult to simultaneously obtain high Curie temperature and piezoelectric performance, low-cost preparation and poor product performance repeatability, the present invention provides a new low-cost piezoelectric ceramic material with

Method used

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  • Preparation method of piezoelectric ceramic with high Curie temperature and film thereof
  • Preparation method of piezoelectric ceramic with high Curie temperature and film thereof

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Embodiment 1

[0037] The preparation component is 0.63BiMg 1 / 2 Ti 1 / 2 o3 -0.37PbTiO 3 of ceramics.

[0038] The starting materials are bismuth nitrate, magnesium acetate, tetrabutyl titanate, and lead acetate. The specific steps are: (1) add the required amount of bismuth nitrate in 6mol / L nitric acid with stirring, and heat and stir to make a clear solution; Add the required amount of tetrabutyl titanate to ethanol to make a solution; add the required amount of magnesium acetate and lead acetate to 30wt% acetic acid with stirring to make a clear solution; (2) add a Hydrate citric acid, stir to dissolve, the ratio of the amount of citric acid monohydrate (that is, the number of moles) to the amount of bismuth is 2:1; add citric acid monohydrate to the above tetrabutyl titanate solution, stir and dissolve , the ratio of the amount of substance of citric acid monohydrate and the amount of substance of titanium is 2:1; In above-mentioned magnesium acetate, lead acetate solution, add citric ...

Embodiment 2

[0040] The preparation component is 0.63BiMg 1 / 2 Ti 1 / 2 o 3 -0.37PbTiO 3 -0.001Mn ceramic.

[0041] The starting materials are bismuth nitrate, magnesium acetate, tetrabutyl titanate, lead acetate and manganese nitrate. The specific steps are: (1) add the required amount of bismuth nitrate and manganese nitrate in 6mol / L nitric acid while stirring, and heat Stir to make a clear solution; add a required amount of tetrabutyl titanate to ethanol to make a solution; add a required amount of magnesium acetate and lead acetate under stirring in 30wt% acetic acid to make a clear solution; (2) in the above Add citric acid monohydrate into the bismuth nitrate and manganese nitrate solution, stir and dissolve, the ratio of the amount of citric acid monohydrate (i.e. the number of moles) to the sum of the amounts of bismuth and manganese is 2:1; Add citric acid monohydrate into the tetrabutyl ester solution, stir and dissolve, the ratio of the amount of citric acid monohydrate to the...

Embodiment 3

[0043] The preparation component is 0.65BiMg 1 / 2 Ti 1 / 2 o 3 -0.35PbTiO 3 -0.0005Cr ceramic.

[0044] The starting materials are bismuth nitrate, magnesium acetate, tetrabutyl titanate, lead acetate and chromium nitrate. The specific steps are: (1) add the required amount of bismuth nitrate and chromium nitrate in 5mol / L nitric acid while stirring, and heat Stir to make a clear solution; add a required amount of tetrabutyl titanate to ethanol to make a solution; add a required amount of lead acetate under stirring in 30wt% acetic acid to make a clear solution; (2) in the above-mentioned bismuth nitrate, Add citric acid monohydrate into the chromium nitrate solution, stir and dissolve, the ratio of the amount of citric acid monohydrate (ie moles) to the sum of the amounts of bismuth and chromium is 2:1; in the above-mentioned tetrabutyl titanate Add citric acid monohydrate in the solution, stir and dissolve, the ratio of the amount of substance of citric acid monohydrate to ...

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Abstract

The invention relates to a preparation method of a piezoelectric ceramic with a high Curie temperature and a film thereof. The chemical formula of the prepared piezoelectric ceramic material is (1-x)(BiMg<1/2>Ti<1/2>O<3>)-x(PbTiO<3>)-yMe, wherein 0.3<=x<=0.45, 0<=y<=0.05, and Me represents a modifying element. Bismuth salts, magnesium salts, lead salts, chromium salts, or/and manganese salts and organic titanium salts are taken as the primary raw materials; through selecting a proper dispersing medium and controlling the solution temperature and concentration and addition sequence, the metal salts form uniform sol through the chelating effect of a stabilizing agent, then the sol is concentrated, dried and calcined to obtain piezoelectric nano powder with a high Curie temperature, and the piezoelectric nano powder is ball-grinded, dried, screened, pressed, and sintered to prepare piezoelectric ceramic with a high Curie temperature. Or through various solution methods such as spin coating, infiltrating, and the like, uniform sol is painted on an inorganic substrate to prepare a film, and then the substrate is dried and annealed to prepare a piezoelectric ceramic film. The prepared piezoelectric ceramic film can be used to prepare various related piezoelectric devices with a work temperature higher than 200 DEG C such as energy converter, sensor, and the like, and has a wide application prospect.

Description

technical field [0001] The invention relates to the technical field of electronic ceramics and piezoelectric materials, in particular to a preparation method of high Curie temperature piezoelectric ceramics and a film thereof. Background technique [0002] Piezoelectric ceramics are widely used in various sensors, transducers and microelectronic devices. The rapid development of geological exploration, aerospace and automobile industry has put forward higher requirements for the high temperature environment operation of various acoustic transducers and vibration sensors, etc., and correspondingly requires the piezoelectric materials used in these devices to have higher Curie temperature (Tc). The Tc of lead zirconate titanate (PZT), the most commonly used piezoelectric ceramic, is generally lower than 360°C. As the temperature rises, the material will gradually depolarize and cause the degradation of piezoelectric properties. The upper limit of its working temperature is g...

Claims

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Application Information

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IPC IPC(8): C04B35/475
CPCC04B35/475C04B2235/3232C04B2235/40C04B2235/404
Inventor 郭栋王云丽蔡锴江凤
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI
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