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External temperature control type intelligent gas-sensitive analysis device

An analytical device and intelligent technology, applied in the direction of measuring device, analytical material, auxiliary controller with auxiliary heating device, etc., can solve the problems of inability to use sintered gas-sensing materials, complex process, complicated operation, etc., to achieve a wide range of applications , Wide measurement range and controllable heating temperature

Inactive Publication Date: 2016-10-05
北京艾立特科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

This method is not only complicated to operate, but also has certain limitations, especially it cannot be used for the study of the characteristics of thin-film materials and gas-sensitive materials with poor adhesion and difficult sintering
[0003] The development of semiconductor processing technology, especially silicon devices, has enabled planar devices to be used in the field of gas sensors. This type of device can solve the problem of deviceization of new materials, but it needs to use multi-layer substrates to make devices, and the substrate needs to be integrated at the same time. electrodes, heating electrodes and temperature measuring electrodes to achieve measurement and temperature control at the same time, usually the process of making this multi-layer substrate is complicated and the cost is high

Method used

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  • External temperature control type intelligent gas-sensitive analysis device
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  • External temperature control type intelligent gas-sensitive analysis device

Examples

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Embodiment 1

[0041] In this embodiment, the CZ-16 type Ce-doped ZnO powder of Beijing Zhongju Technology Co., Ltd. is used as a test sample to provide a specific method for the analysis of the gas-sensing characteristics of the above-mentioned gas-sensing analysis device.

[0042] The first method is the dynamic gas distribution test method under different pressures, the steps are as follows:

[0043] 1. Sample preparation method: mix the sample with a resistivity of 18.0MΩcm -1 mixed with deionized water to form a slurry, coated on the finger-shaped electrode part of the electrode substrate (8), and then dried at 60°C.

[0044] 2. Refer to figure 1 and 2 , place the prepared sample on the sample test platform (111), use the adjustment bracket (121) to adjust the position of the elastic probe (122), to ensure good contact between the probe and the sample to be tested.

[0045] 3. Connect the circuit and turn on the test system, set the working temperature of the test sample on the touch...

Embodiment 2

[0059] This embodiment uses Beijing Elite Technology Co., Ltd. YSZ-103 type Y-doped ZrO 2 The thin film is used as a test sample to provide a specific method for the analysis of gas-sensing characteristics of the above-mentioned gas-sensing analysis device.

[0060] This embodiment supports the above three test methods at the same time, and the difference from Embodiment 1 is:

[0061] 1. The test sample is a thin film made on a silicon wafer. There is a Pt electrode made by magnetron sputtering at each of the two points of the thin film, so no other substrate is needed, and the test only needs to be pressed on the Pt electrode with a probe.

[0062] 2. Change the test mode to voltage test mode. Figure 9 Typical test results for 10ppm NO at 400°C under dynamic gas distribution are given.

Embodiment 3

[0064] This example uses the PW-115 type WO of Beijing Zhongju Technology Co., Ltd. 3 The nanotube is used as a test sample to provide a specific method for analyzing the gas-sensing characteristics of the above-mentioned gas-sensing analysis device.

[0065] This embodiment supports the above three test methods at the same time, and the difference from Embodiment 1 is:

[0066] 1. Change the test mode to current test mode. Figure 10 The test results of the test sample against the static configuration of 100ppm ethanol at 200°C are given.

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Abstract

The invention belongs to the gas-sensitive analysis system field and relates to an external temperature control type intelligent gas-sensitive analysis device. The device is characterized in that the device can realize direct analysis on the gas-sensitive properties of materials and realize independence of material gas-sensitive property research from sensor devices. The external temperature control type intelligent gas-sensitive analysis device provided by the invention comprises a test platform (1), a gas chamber (2), a control system (3), a cooling water circulation box (4), a vacuum pump (5), a dynamic gas distribution system (6) and test software (7); the test platform (1) is internally provided with a temperature control device (11), a probe adjusting device (12), a liquid evaporator (13), a fan (14), a lighting unit (15), a vacuum gauge (16), a vacuumizing channel (17), a gas path (18) and a temperature and humidity sensor (19); the temperature control device (11) comprises a sample test bench (111), a built-in heater(112), a temperature sensor (113) and a water cooling protection system (114) wrapping around the heater (112); the temperature control device (11) can directly carry out external temperature control on a test sample; the probe adjusting device (12) comprises an adjusting bracket (121) and an elastic probe (122); and a contact point of the elastic probe (122) and the test sample can be adjusted through the adjusting bracket (121).

Description

technical field [0001] The invention belongs to the field of gas-sensing analysis devices, and in particular relates to an external temperature-controlling intelligent gas-sensing analysis device, which is characterized in that it can realize the direct analysis of the gas-sensing characteristics of materials, and gets rid of the dependence of the research on the gas-sensing characteristics of materials on sensor devices. Background technique [0002] Gas sensors have important application values ​​in the fields of environment, industry, food, transportation, and national defense, and have aroused widespread interest since their discovery. At present, the most commonly used gas sensors on the market are based on semiconductor oxide materials to make side-heating sensor devices. The advantages of this type of sensor are high stability and good consistency, but there are also disadvantages such as poor selectivity, high operating temperature, low sensitivity, For defects such ...

Claims

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Application Information

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IPC IPC(8): G05D23/32G01N33/00
Inventor 徐冬梅漆奇曹峰
Owner 北京艾立特科技有限公司
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