Method for preparing zinc oxide/gallium nitride composite film
A composite film, gallium nitride technology, applied in the field of photocatalysis, can solve the problems of difficult collection and reuse, and achieve the effects of easy reuse, expansion of preparation methods, and obvious visible light response
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[0023] Example 1
[0024] The sapphire substrate was ultrasonically cleaned in acetone, absolute ethanol and deionized water for 15 minutes, then dried with nitrogen, and placed in a vacuum deposition chamber. The experiment adopts pulsed laser deposition method, and the target materials are high-purity zinc oxide and gallium nitride, which are respectively loaded on target trays with a distance of 30 degrees. Vacuuming by mechanical pump and molecular pump makes the vacuum degree of the deposition chamber reach 5×10 -7 Torr. High-purity nitrogen gas was introduced, and the gas flow rate was 30 sccm. Let stand for a period of time to stabilize the vacuum degree in the deposition chamber to 1.2×10 -2 Torr. The deposited substrate temperature was room temperature (23°C). The laser light source uses a KrF excimer laser with a laser wavelength of 248nm, a frequency of 3Hz, and a laser energy of 220mJ. The laser is focused on the target through an external focusing mirror. The dis...
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[0028] Example 2
[0029] The substrate deposition temperature in Example 1 was increased from room temperature (23°C) to 50°C and the temperature was kept constant during the deposition process. Figure 4 It is the transmission spectrum of the zinc oxide / gallium nitride composite film prepared when the substrate temperature is 50℃. It can be seen from the figure that the absorption edge of the transmission has a clear blue shift compared with that at room temperature, indicating that the deposition temperature is increased The band gap of the zinc oxide / gallium nitride composite film is improved, and the band gap width is about 1.7 eV after analysis.
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